High-power ion beam sources for industrial application

G. E. Remnev, I. F. Isakov, M. S. Opekounov, G. I. Kotlyarevsky, V. L. Kutuzov, V. S. Lopatin, V. M. Matvienko, M. Yu Ovsyannikov, A. V. Potyomkin, Vladislav Alexandrovich Tarbokov

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

Two sources of high-power ion beams of nanosecond duration are described, a MUK and a TEMP unit They generated ions with energies of up to 150 and 300 keV, respectively, and the pulse duration was 20-200 and 50 ns, respectively. For the MUK unit, beam parameters for heavy ion implantation (Aln+ , Mgn+ , Fen+ , Wn+ , etc.) were as follows: current density ranging from 1 to 10 A cm-2 and total ion flux energy up to 20 J. For the TEMP unit, the following beam parameters were used for H+ and Cn+ ions: current density 40-200 A cm-2 and total ion flux energy 0.3-0.5 kJ. The sources are powered by various diode systems and can be applied in material science for scientific research and technology.

Original languageEnglish
Pages (from-to)103-109
Number of pages7
JournalSurface and Coatings Technology
Volume96
Issue number1
Publication statusPublished - 3 Nov 1997

Fingerprint

Ion beams
Industrial applications
ion beams
Ions
current density
ions
Current density
materials science
Fluxes
Heavy Ions
ion currents
ion implantation
energy
heavy ions
pulse duration
Materials science
Heavy ions
diodes
Ion implantation
Diodes

Keywords

  • High-power ion beams
  • Short pulse ion implantation
  • Surface modification

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Remnev, G. E., Isakov, I. F., Opekounov, M. S., Kotlyarevsky, G. I., Kutuzov, V. L., Lopatin, V. S., ... Tarbokov, V. A. (1997). High-power ion beam sources for industrial application. Surface and Coatings Technology, 96(1), 103-109.

High-power ion beam sources for industrial application. / Remnev, G. E.; Isakov, I. F.; Opekounov, M. S.; Kotlyarevsky, G. I.; Kutuzov, V. L.; Lopatin, V. S.; Matvienko, V. M.; Ovsyannikov, M. Yu; Potyomkin, A. V.; Tarbokov, Vladislav Alexandrovich.

In: Surface and Coatings Technology, Vol. 96, No. 1, 03.11.1997, p. 103-109.

Research output: Contribution to journalArticle

Remnev, GE, Isakov, IF, Opekounov, MS, Kotlyarevsky, GI, Kutuzov, VL, Lopatin, VS, Matvienko, VM, Ovsyannikov, MY, Potyomkin, AV & Tarbokov, VA 1997, 'High-power ion beam sources for industrial application', Surface and Coatings Technology, vol. 96, no. 1, pp. 103-109.
Remnev GE, Isakov IF, Opekounov MS, Kotlyarevsky GI, Kutuzov VL, Lopatin VS et al. High-power ion beam sources for industrial application. Surface and Coatings Technology. 1997 Nov 3;96(1):103-109.
Remnev, G. E. ; Isakov, I. F. ; Opekounov, M. S. ; Kotlyarevsky, G. I. ; Kutuzov, V. L. ; Lopatin, V. S. ; Matvienko, V. M. ; Ovsyannikov, M. Yu ; Potyomkin, A. V. ; Tarbokov, Vladislav Alexandrovich. / High-power ion beam sources for industrial application. In: Surface and Coatings Technology. 1997 ; Vol. 96, No. 1. pp. 103-109.
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AU - Kutuzov, V. L.

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AU - Matvienko, V. M.

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