Two-high power excimer laser systems with square (25 × 25 cm) and circular (with a diameter of 40 cm) cross sections of the output laser beam are described. The first (second) system consists of four (five) excimer lasers. The experimental results on the generation of the high-quality high-power laser pulses are presented. Laser beams with a pulse duration of 1-250 ns, a divergence of 0.01 mrad, a spectral line width of 0.01 cm-1, and a pulse energy of up to 330 J are obtained.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Physics and Astronomy (miscellaneous)