High-power excimer laser systems

E. N. Abdullin, N. G. Ivanov, B. M. Kovalchuk, I. N. Konovalov, V. F. Losev, A. N. Panchenko, Yu N. Panchenko, V. S. Skakun, V. F. Tarasenko, A. G. Yastremsky

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    Abstract

    Two-high power excimer laser systems with square (25 × 25 cm) and circular (with a diameter of 40 cm) cross sections of the output laser beam are described. The first (second) system consists of four (five) excimer lasers. The experimental results on the generation of the high-quality high-power laser pulses are presented. Laser beams with a pulse duration of 1-250 ns, a divergence of 0.01 mrad, a spectral line width of 0.01 cm-1, and a pulse energy of up to 330 J are obtained.

    Original languageEnglish
    Pages (from-to)104-115
    Number of pages12
    JournalLaser Physics
    Volume16
    Issue number1
    DOIs
    Publication statusPublished - Jan 2006

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    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics
    • Physics and Astronomy (miscellaneous)

    Cite this

    Abdullin, E. N., Ivanov, N. G., Kovalchuk, B. M., Konovalov, I. N., Losev, V. F., Panchenko, A. N., ... Yastremsky, A. G. (2006). High-power excimer laser systems. Laser Physics, 16(1), 104-115. https://doi.org/10.1134/S1054660X06010099