High-power excimer laser systems

E. N. Abdullin, N. G. Ivanov, B. M. Kovalchuk, I. N. Konovalov, V. F. Losev, A. N. Panchenko, Yu N. Panchenko, V. S. Skakun, V. F. Tarasenko, A. G. Yastremsky

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    Two-high power excimer laser systems with square (25 × 25 cm) and circular (with a diameter of 40 cm) cross sections of the output laser beam are described. The first (second) system consists of four (five) excimer lasers. The experimental results on the generation of the high-quality high-power laser pulses are presented. Laser beams with a pulse duration of 1-250 ns, a divergence of 0.01 mrad, a spectral line width of 0.01 cm-1, and a pulse energy of up to 330 J are obtained.

    Original languageEnglish
    Pages (from-to)104-115
    Number of pages12
    JournalLaser Physics
    Volume16
    Issue number1
    DOIs
    Publication statusPublished - Jan 2006

    Fingerprint

    High power lasers
    Excimer lasers
    excimer lasers
    high power lasers
    Laser beams
    Laser pulses
    spectral line width
    laser beams
    pulses
    Linewidth
    divergence
    pulse duration
    output
    cross sections
    energy

    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics
    • Physics and Astronomy (miscellaneous)

    Cite this

    Abdullin, E. N., Ivanov, N. G., Kovalchuk, B. M., Konovalov, I. N., Losev, V. F., Panchenko, A. N., ... Yastremsky, A. G. (2006). High-power excimer laser systems. Laser Physics, 16(1), 104-115. https://doi.org/10.1134/S1054660X06010099

    High-power excimer laser systems. / Abdullin, E. N.; Ivanov, N. G.; Kovalchuk, B. M.; Konovalov, I. N.; Losev, V. F.; Panchenko, A. N.; Panchenko, Yu N.; Skakun, V. S.; Tarasenko, V. F.; Yastremsky, A. G.

    In: Laser Physics, Vol. 16, No. 1, 01.2006, p. 104-115.

    Research output: Contribution to journalArticle

    Abdullin, EN, Ivanov, NG, Kovalchuk, BM, Konovalov, IN, Losev, VF, Panchenko, AN, Panchenko, YN, Skakun, VS, Tarasenko, VF & Yastremsky, AG 2006, 'High-power excimer laser systems', Laser Physics, vol. 16, no. 1, pp. 104-115. https://doi.org/10.1134/S1054660X06010099
    Abdullin EN, Ivanov NG, Kovalchuk BM, Konovalov IN, Losev VF, Panchenko AN et al. High-power excimer laser systems. Laser Physics. 2006 Jan;16(1):104-115. https://doi.org/10.1134/S1054660X06010099
    Abdullin, E. N. ; Ivanov, N. G. ; Kovalchuk, B. M. ; Konovalov, I. N. ; Losev, V. F. ; Panchenko, A. N. ; Panchenko, Yu N. ; Skakun, V. S. ; Tarasenko, V. F. ; Yastremsky, A. G. / High-power excimer laser systems. In: Laser Physics. 2006 ; Vol. 16, No. 1. pp. 104-115.
    @article{2ae5c6dca5bc4651a721c0a6ab573b39,
    title = "High-power excimer laser systems",
    abstract = "Two-high power excimer laser systems with square (25 × 25 cm) and circular (with a diameter of 40 cm) cross sections of the output laser beam are described. The first (second) system consists of four (five) excimer lasers. The experimental results on the generation of the high-quality high-power laser pulses are presented. Laser beams with a pulse duration of 1-250 ns, a divergence of 0.01 mrad, a spectral line width of 0.01 cm-1, and a pulse energy of up to 330 J are obtained.",
    author = "Abdullin, {E. N.} and Ivanov, {N. G.} and Kovalchuk, {B. M.} and Konovalov, {I. N.} and Losev, {V. F.} and Panchenko, {A. N.} and Panchenko, {Yu N.} and Skakun, {V. S.} and Tarasenko, {V. F.} and Yastremsky, {A. G.}",
    year = "2006",
    month = "1",
    doi = "10.1134/S1054660X06010099",
    language = "English",
    volume = "16",
    pages = "104--115",
    journal = "Laser Physics",
    issn = "1054-660X",
    publisher = "Maik Nauka-Interperiodica Publishing",
    number = "1",

    }

    TY - JOUR

    T1 - High-power excimer laser systems

    AU - Abdullin, E. N.

    AU - Ivanov, N. G.

    AU - Kovalchuk, B. M.

    AU - Konovalov, I. N.

    AU - Losev, V. F.

    AU - Panchenko, A. N.

    AU - Panchenko, Yu N.

    AU - Skakun, V. S.

    AU - Tarasenko, V. F.

    AU - Yastremsky, A. G.

    PY - 2006/1

    Y1 - 2006/1

    N2 - Two-high power excimer laser systems with square (25 × 25 cm) and circular (with a diameter of 40 cm) cross sections of the output laser beam are described. The first (second) system consists of four (five) excimer lasers. The experimental results on the generation of the high-quality high-power laser pulses are presented. Laser beams with a pulse duration of 1-250 ns, a divergence of 0.01 mrad, a spectral line width of 0.01 cm-1, and a pulse energy of up to 330 J are obtained.

    AB - Two-high power excimer laser systems with square (25 × 25 cm) and circular (with a diameter of 40 cm) cross sections of the output laser beam are described. The first (second) system consists of four (five) excimer lasers. The experimental results on the generation of the high-quality high-power laser pulses are presented. Laser beams with a pulse duration of 1-250 ns, a divergence of 0.01 mrad, a spectral line width of 0.01 cm-1, and a pulse energy of up to 330 J are obtained.

    UR - http://www.scopus.com/inward/record.url?scp=33750922524&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=33750922524&partnerID=8YFLogxK

    U2 - 10.1134/S1054660X06010099

    DO - 10.1134/S1054660X06010099

    M3 - Article

    VL - 16

    SP - 104

    EP - 115

    JO - Laser Physics

    JF - Laser Physics

    SN - 1054-660X

    IS - 1

    ER -