High intensity pulsed ion beam sources and their industrial applications

Abstract

This paper presents research on practical applications of high intensity pulsed ion beams (HIPIBs) investigated at the Nuclear Physics Institute of the Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise 'Linetron', N. Novgorod. The most interesting scientific results have been obtained in the following fields: HIPIB surface modification for the increase of wear resistance of tools; deposition of thin metal, composite and diamond-like carbon (DLC) films; short-pulse ion implantation in semiconductors. It was shown that ion beams with relatively low power density (10⁶-10⁹W/cm²) are very promising for industrial applications. The paper presents a brief description of the HIPIB-solids interaction and main HIPIB parameters used in the research, as well as modification of properties of treated samples.

Original language	English
Pages (from-to)	206-212
Number of pages	7
Journal	Surface and Coatings Technology
Volume	114
Issue number	2-3
Publication status	Published - 12 May 1999

Keywords

Deposition
High intensity pulsed ion beams
Ion implantation
Semiconductors
Surface modification
Thin films
Wear resistance

ASJC Scopus subject areas

Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

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High intensity pulsed ion beam sources and their industrial applications. / Remnev, G. E.; Isakov, I. F.; Opekounov, M. S.; Matvienko, V. M.; Ryzhkov, V. A.; Struts, V. K.; Grushin, I. I.; Zakoutayev, A. N.; Potyomkin, A. V.; Tarbokov, Vladislav Alexandrovich; Pushkaryov, A. N.; Kutuzov, V. L.; Ovsyannikov, M. Yu.

In: Surface and Coatings Technology, Vol. 114, No. 2-3, 12.05.1999, p. 206-212.

Research output: Contribution to journal › Article › peer-review

Remnev, G. E. ; Isakov, I. F. ; Opekounov, M. S. ; Matvienko, V. M. ; Ryzhkov, V. A. ; Struts, V. K. ; Grushin, I. I. ; Zakoutayev, A. N. ; Potyomkin, A. V. ; Tarbokov, Vladislav Alexandrovich ; Pushkaryov, A. N. ; Kutuzov, V. L. ; Ovsyannikov, M. Yu. / High intensity pulsed ion beam sources and their industrial applications. In: Surface and Coatings Technology. 1999 ; Vol. 114, No. 2-3. pp. 206-212.

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title = "High intensity pulsed ion beam sources and their industrial applications",

abstract = "This paper presents research on practical applications of high intensity pulsed ion beams (HIPIBs) investigated at the Nuclear Physics Institute of the Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise 'Linetron', N. Novgorod. The most interesting scientific results have been obtained in the following fields: HIPIB surface modification for the increase of wear resistance of tools; deposition of thin metal, composite and diamond-like carbon (DLC) films; short-pulse ion implantation in semiconductors. It was shown that ion beams with relatively low power density (106-109W/cm2) are very promising for industrial applications. The paper presents a brief description of the HIPIB-solids interaction and main HIPIB parameters used in the research, as well as modification of properties of treated samples.",

keywords = "Deposition, High intensity pulsed ion beams, Ion implantation, Semiconductors, Surface modification, Thin films, Wear resistance",

author = "Remnev, {G. E.} and Isakov, {I. F.} and Opekounov, {M. S.} and Matvienko, {V. M.} and Ryzhkov, {V. A.} and Struts, {V. K.} and Grushin, {I. I.} and Zakoutayev, {A. N.} and Potyomkin, {A. V.} and Tarbokov, {Vladislav Alexandrovich} and Pushkaryov, {A. N.} and Kutuzov, {V. L.} and Ovsyannikov, {M. Yu}",

year = "1999",

month = may,

day = "12",

language = "English",

volume = "114",

pages = "206--212",

journal = "Surface and Coatings Technology",

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T1 - High intensity pulsed ion beam sources and their industrial applications

AU - Remnev, G. E.

AU - Isakov, I. F.

AU - Opekounov, M. S.

AU - Matvienko, V. M.

AU - Ryzhkov, V. A.

AU - Struts, V. K.

AU - Grushin, I. I.

AU - Zakoutayev, A. N.

AU - Potyomkin, A. V.

AU - Tarbokov, Vladislav Alexandrovich

AU - Pushkaryov, A. N.

AU - Kutuzov, V. L.

AU - Ovsyannikov, M. Yu

PY - 1999/5/12

Y1 - 1999/5/12

N2 - This paper presents research on practical applications of high intensity pulsed ion beams (HIPIBs) investigated at the Nuclear Physics Institute of the Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise 'Linetron', N. Novgorod. The most interesting scientific results have been obtained in the following fields: HIPIB surface modification for the increase of wear resistance of tools; deposition of thin metal, composite and diamond-like carbon (DLC) films; short-pulse ion implantation in semiconductors. It was shown that ion beams with relatively low power density (106-109W/cm2) are very promising for industrial applications. The paper presents a brief description of the HIPIB-solids interaction and main HIPIB parameters used in the research, as well as modification of properties of treated samples.

AB - This paper presents research on practical applications of high intensity pulsed ion beams (HIPIBs) investigated at the Nuclear Physics Institute of the Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise 'Linetron', N. Novgorod. The most interesting scientific results have been obtained in the following fields: HIPIB surface modification for the increase of wear resistance of tools; deposition of thin metal, composite and diamond-like carbon (DLC) films; short-pulse ion implantation in semiconductors. It was shown that ion beams with relatively low power density (106-109W/cm2) are very promising for industrial applications. The paper presents a brief description of the HIPIB-solids interaction and main HIPIB parameters used in the research, as well as modification of properties of treated samples.

KW - Deposition

KW - High intensity pulsed ion beams

KW - Ion implantation

KW - Semiconductors

KW - Surface modification

KW - Thin films

KW - Wear resistance

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