High intensity pulsed ion beam sources and their industrial applications

G. E. Remnev, I. F. Isakov, M. S. Opekounov, V. M. Matvienko, V. A. Ryzhkov, V. K. Struts, I. I. Grushin, A. N. Zakoutayev, A. V. Potyomkin, Vladislav Alexandrovich Tarbokov, A. N. Pushkaryov, V. L. Kutuzov, M. Yu Ovsyannikov

Research output: Contribution to journal › Article

132 Citations (Scopus)

Abstract

This paper presents research on practical applications of high intensity pulsed ion beams (HIPIBs) investigated at the Nuclear Physics Institute of the Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise 'Linetron', N. Novgorod. The most interesting scientific results have been obtained in the following fields: HIPIB surface modification for the increase of wear resistance of tools; deposition of thin metal, composite and diamond-like carbon (DLC) films; short-pulse ion implantation in semiconductors. It was shown that ion beams with relatively low power density (106-109W/cm2) are very promising for industrial applications. The paper presents a brief description of the HIPIB-solids interaction and main HIPIB parameters used in the research, as well as modification of properties of treated samples.

Original languageEnglish
Pages (from-to)206-212
Number of pages7
JournalSurface and Coatings Technology
Volume114
Issue number2-3
Publication statusPublished - 12 May 1999

Fingerprint

Ion beams
Industrial applications
ion beams
Nuclear physics
Diamond like carbon films
Beam plasma interactions
nuclear physics
wear resistance
Ion implantation
Wear resistance
Surface treatment
ion implantation
radiant flux density
Metals
diamonds
Semiconductor materials
composite materials
carbon
Composite materials
pulses

Keywords

  • Deposition
  • High intensity pulsed ion beams
  • Ion implantation
  • Semiconductors
  • Surface modification
  • Thin films
  • Wear resistance

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Remnev, G. E., Isakov, I. F., Opekounov, M. S., Matvienko, V. M., Ryzhkov, V. A., Struts, V. K., ... Ovsyannikov, M. Y. (1999). High intensity pulsed ion beam sources and their industrial applications. Surface and Coatings Technology, 114(2-3), 206-212.

High intensity pulsed ion beam sources and their industrial applications. / Remnev, G. E.; Isakov, I. F.; Opekounov, M. S.; Matvienko, V. M.; Ryzhkov, V. A.; Struts, V. K.; Grushin, I. I.; Zakoutayev, A. N.; Potyomkin, A. V.; Tarbokov, Vladislav Alexandrovich; Pushkaryov, A. N.; Kutuzov, V. L.; Ovsyannikov, M. Yu.

In: Surface and Coatings Technology, Vol. 114, No. 2-3, 12.05.1999, p. 206-212.

Research output: Contribution to journal › Article

Remnev, GE, Isakov, IF, Opekounov, MS, Matvienko, VM, Ryzhkov, VA, Struts, VK, Grushin, II, Zakoutayev, AN, Potyomkin, AV, Tarbokov, VA, Pushkaryov, AN, Kutuzov, VL & Ovsyannikov, MY 1999, 'High intensity pulsed ion beam sources and their industrial applications', Surface and Coatings Technology, vol. 114, no. 2-3, pp. 206-212.
Remnev GE, Isakov IF, Opekounov MS, Matvienko VM, Ryzhkov VA, Struts VK et al. High intensity pulsed ion beam sources and their industrial applications. Surface and Coatings Technology. 1999 May 12;114(2-3):206-212.
Remnev, G. E. ; Isakov, I. F. ; Opekounov, M. S. ; Matvienko, V. M. ; Ryzhkov, V. A. ; Struts, V. K. ; Grushin, I. I. ; Zakoutayev, A. N. ; Potyomkin, A. V. ; Tarbokov, Vladislav Alexandrovich ; Pushkaryov, A. N. ; Kutuzov, V. L. ; Ovsyannikov, M. Yu. / High intensity pulsed ion beam sources and their industrial applications. In: Surface and Coatings Technology. 1999 ; Vol. 114, No. 2-3. pp. 206-212.
@article{a72ed1f61d054da5b906522f8bcee38e,
title = "High intensity pulsed ion beam sources and their industrial applications",
abstract = "This paper presents research on practical applications of high intensity pulsed ion beams (HIPIBs) investigated at the Nuclear Physics Institute of the Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise 'Linetron', N. Novgorod. The most interesting scientific results have been obtained in the following fields: HIPIB surface modification for the increase of wear resistance of tools; deposition of thin metal, composite and diamond-like carbon (DLC) films; short-pulse ion implantation in semiconductors. It was shown that ion beams with relatively low power density (106-109W/cm2) are very promising for industrial applications. The paper presents a brief description of the HIPIB-solids interaction and main HIPIB parameters used in the research, as well as modification of properties of treated samples.",
keywords = "Deposition, High intensity pulsed ion beams, Ion implantation, Semiconductors, Surface modification, Thin films, Wear resistance",
author = "Remnev, {G. E.} and Isakov, {I. F.} and Opekounov, {M. S.} and Matvienko, {V. M.} and Ryzhkov, {V. A.} and Struts, {V. K.} and Grushin, {I. I.} and Zakoutayev, {A. N.} and Potyomkin, {A. V.} and Tarbokov, {Vladislav Alexandrovich} and Pushkaryov, {A. N.} and Kutuzov, {V. L.} and Ovsyannikov, {M. Yu}",
year = "1999",
month = "5",
day = "12",
language = "English",
volume = "114",
pages = "206--212",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "2-3",

}

TY - JOUR

T1 - High intensity pulsed ion beam sources and their industrial applications

AU - Remnev, G. E.

AU - Isakov, I. F.

AU - Opekounov, M. S.

AU - Matvienko, V. M.

AU - Ryzhkov, V. A.

AU - Struts, V. K.

AU - Grushin, I. I.

AU - Zakoutayev, A. N.

AU - Potyomkin, A. V.

AU - Tarbokov, Vladislav Alexandrovich

AU - Pushkaryov, A. N.

AU - Kutuzov, V. L.

AU - Ovsyannikov, M. Yu

PY - 1999/5/12

Y1 - 1999/5/12

N2 - This paper presents research on practical applications of high intensity pulsed ion beams (HIPIBs) investigated at the Nuclear Physics Institute of the Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise 'Linetron', N. Novgorod. The most interesting scientific results have been obtained in the following fields: HIPIB surface modification for the increase of wear resistance of tools; deposition of thin metal, composite and diamond-like carbon (DLC) films; short-pulse ion implantation in semiconductors. It was shown that ion beams with relatively low power density (106-109W/cm2) are very promising for industrial applications. The paper presents a brief description of the HIPIB-solids interaction and main HIPIB parameters used in the research, as well as modification of properties of treated samples.

AB - This paper presents research on practical applications of high intensity pulsed ion beams (HIPIBs) investigated at the Nuclear Physics Institute of the Tomsk Polytechnic University (NPI TPU) and the Scientific Industrial Enterprise 'Linetron', N. Novgorod. The most interesting scientific results have been obtained in the following fields: HIPIB surface modification for the increase of wear resistance of tools; deposition of thin metal, composite and diamond-like carbon (DLC) films; short-pulse ion implantation in semiconductors. It was shown that ion beams with relatively low power density (106-109W/cm2) are very promising for industrial applications. The paper presents a brief description of the HIPIB-solids interaction and main HIPIB parameters used in the research, as well as modification of properties of treated samples.

KW - Deposition

KW - High intensity pulsed ion beams

KW - Ion implantation

KW - Semiconductors

KW - Surface modification

KW - Thin films

KW - Wear resistance

UR - http://www.scopus.com/inward/record.url?scp=0032672972&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032672972&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0032672972

VL - 114

SP - 206

EP - 212

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 2-3

ER -

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