High intensity, low ion energy implantation of nitrogen in AISI 5140 alloy steel

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13 Citations (Scopus)


This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.

Original languageEnglish
Pages (from-to)129-135
Number of pages7
JournalSurface and Coatings Technology
Publication statusPublished - 15 Dec 2018


  • Low ion energy implantation deep nitrogen dopants distribution
  • Nitrogen ion beam high intensity

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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