High intensity, low ion energy implantation of nitrogen in AISI 5140 alloy steel

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Abstract

This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.

Original languageEnglish
Pages (from-to)129-135
Number of pages7
JournalSurface and Coatings Technology
Volume355
DOIs
Publication statusPublished - 15 Dec 2018

Fingerprint

nitrogen ions
Alloy steel
Ion implantation
Ion beams
implantation
Nitrogen
ion beams
steels
Ions
nitrogen
arc generators
Laser pulses
ions
pulses
grids
hot cathodes
Nitrogen plasma
Plasmas
Plasma flow
Pulse repetition rate

Keywords

  • Low ion energy implantation deep nitrogen dopants distribution
  • Nitrogen ion beam high intensity

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

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title = "High intensity, low ion energy implantation of nitrogen in AISI 5140 alloy steel",
abstract = "This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.",
keywords = "Low ion energy implantation deep nitrogen dopants distribution, Nitrogen ion beam high intensity",
author = "Alexander Ryabchikov and Denis Sivin and Peter Ananin and Anna Ivanova and Ilya Lopatin and Olga Korneva and Alexey Shevelev",
year = "2018",
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pages = "129--135",
journal = "Surface and Coatings Technology",
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TY - JOUR

T1 - High intensity, low ion energy implantation of nitrogen in AISI 5140 alloy steel

AU - Ryabchikov, Alexander

AU - Sivin, Denis

AU - Ananin, Peter

AU - Ivanova, Anna

AU - Lopatin, Ilya

AU - Korneva, Olga

AU - Shevelev, Alexey

PY - 2018/12/15

Y1 - 2018/12/15

N2 - This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.

AB - This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.

KW - Low ion energy implantation deep nitrogen dopants distribution

KW - Nitrogen ion beam high intensity

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U2 - 10.1016/j.surfcoat.2018.02.110

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EP - 135

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

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