Abstract
This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.
Original language | English |
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Pages (from-to) | 129-135 |
Number of pages | 7 |
Journal | Surface and Coatings Technology |
Volume | 355 |
DOIs | |
Publication status | Published - 15 Dec 2018 |
Keywords
- Low ion energy implantation deep nitrogen dopants distribution
- Nitrogen ion beam high intensity
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry