Abstract
This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.
| Original language | English |
|---|---|
| Pages (from-to) | 129-135 |
| Number of pages | 7 |
| Journal | Surface and Coatings Technology |
| Volume | 355 |
| DOIs | |
| Publication status | Published - 15 Dec 2018 |
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Keywords
- Low ion energy implantation deep nitrogen dopants distribution
- Nitrogen ion beam high intensity
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
High intensity, low ion energy implantation of nitrogen in AISI 5140 alloy steel. / Ryabchikov, Alexander; Sivin, Denis; Ananin, Peter; Ivanova, Anna; Lopatin, Ilya; Korneva, Olga; Shevelev, Alexey.
In: Surface and Coatings Technology, Vol. 355, 15.12.2018, p. 129-135.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - High intensity, low ion energy implantation of nitrogen in AISI 5140 alloy steel
AU - Ryabchikov, Alexander
AU - Sivin, Denis
AU - Ananin, Peter
AU - Ivanova, Anna
AU - Lopatin, Ilya
AU - Korneva, Olga
AU - Shevelev, Alexey
PY - 2018/12/15
Y1 - 2018/12/15
N2 - This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.
AB - This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.
KW - Low ion energy implantation deep nitrogen dopants distribution
KW - Nitrogen ion beam high intensity
UR - http://www.scopus.com/inward/record.url?scp=85045535312&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85045535312&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2018.02.110
DO - 10.1016/j.surfcoat.2018.02.110
M3 - Article
AN - SCOPUS:85045535312
VL - 355
SP - 129
EP - 135
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -