High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma (part two)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An innovative concept in the development of advanced coating deposition and ion implantation method including an application of filtered DC metal plasma source and high-frequency short-pulsed negative bias voltage with a duty factor in the range 10 ÷ 99% are considered. The regularities of ion implantation and metal plasma deposition for dielectric samples are theoretically and experimentally investigated. Experimentally has been shown that metal plasma based ion implantation as well as high-concentration metal plasma ion implantation with compensation of ion surface sputtering by metal plasma deposition as well as ion-assisted coating deposition can be realized by variation of bias potential ranging from 0 V to 4 kV, pulse repetition rate smoothly adjusted in the range (2 ÷ 4.4)x105 p.p.s. and pulse duration ranging from 0.5 to 2 μs. Special features of the material treatment method depending on plasma concentration, pulse repetition rate and duty factor has been examined.

Original languageEnglish
Title of host publicationProceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOIs
Publication statusPublished - 2012
Event2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Russian Federation
Duration: 18 Sep 201221 Sep 2012

Other

Other2012 7th International Forum on Strategic Technology, IFOST 2012
CountryRussian Federation
CityTomsk
Period18.9.1221.9.12

Fingerprint

Ion implantation
Vacuum
Plasmas
Plasma deposition
Pulse repetition rate
Metals
Coatings
Plasma sources
Ions
Bias voltage
Sputtering
Plasma
Implantation
Factors

Keywords

  • plasma filter
  • plasma-immersion ion implantation
  • vacuum-arc plasma

ASJC Scopus subject areas

  • Management of Technology and Innovation

Cite this

High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma (part two). / Ryabchikov, A. I.; Stepanov, I. B.; Sivin, Denis Olegovich; Dektyarev, S. V.; Dodorin, K. Yu.

Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012. 6357801.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ryabchikov, AI, Stepanov, IB, Sivin, DO, Dektyarev, SV & Dodorin, KY 2012, High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma (part two). in Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012., 6357801, 2012 7th International Forum on Strategic Technology, IFOST 2012, Tomsk, Russian Federation, 18.9.12. https://doi.org/10.1109/IFOST.2012.6357801
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