Hard carbon coatings deposited by pulsed high current magnetron sputtering

K. V. Oskomov, A. A. Solov’ev, S. V. Rabotkin

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm3 N−1 m−1, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 1013 cm−3) plasma.

Original languageEnglish
Pages (from-to)1811-1814
Number of pages4
JournalTechnical Physics
Issue number12
Publication statusPublished - 1 Jan 2014

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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