Hard carbon coatings deposited by pulsed high current magnetron sputtering

K. V. Oskomov, A. A. Solov’ev, S. V. Rabotkin

The Weinberg Research Center

Research output: Contribution to journal › Article

Abstract

Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm³ N⁻¹ m⁻¹, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 10¹³ cm⁻³) plasma.

Original language	English
Pages (from-to)	1811-1814
Number of pages	4
Journal	Technical Physics
Volume	59
Issue number	12
DOIs	https://doi.org/10.1134/S1063784214120214
Publication status	Published - 1 Jan 2014

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ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Cite this

Oskomov, K. V., Solov’ev, A. A., & Rabotkin, S. V. (2014). Hard carbon coatings deposited by pulsed high current magnetron sputtering. Technical Physics, 59(12), 1811-1814. https://doi.org/10.1134/S1063784214120214

@article{bc6bd835b8984a26853f0427e3e171f0,

title = "Hard carbon coatings deposited by pulsed high current magnetron sputtering",

abstract = "Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm3 N−1 m−1, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 1013 cm−3) plasma.",

author = "Oskomov, {K. V.} and Solov’ev, {A. A.} and Rabotkin, {S. V.}",

year = "2014",

month = "1",

day = "1",

doi = "10.1134/S1063784214120214",

language = "English",

volume = "59",

pages = "1811--1814",

journal = "Technical Physics",

issn = "1063-7842",

publisher = "Maik Nauka-Interperiodica Publishing",

number = "12",

}

TY - JOUR

T1 - Hard carbon coatings deposited by pulsed high current magnetron sputtering

AU - Oskomov, K. V.

AU - Solov’ev, A. A.

AU - Rabotkin, S. V.

PY - 2014/1/1

Y1 - 2014/1/1

N2 - Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm3 N−1 m−1, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 1013 cm−3) plasma.

AB - Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm3 N−1 m−1, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 1013 cm−3) plasma.

UR - http://www.scopus.com/inward/record.url?scp=84918836499&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84918836499&partnerID=8YFLogxK

U2 - 10.1134/S1063784214120214

DO - 10.1134/S1063784214120214

M3 - Article

AN - SCOPUS:84918836499

VL - 59

SP - 1811

EP - 1814

JO - Technical Physics

JF - Technical Physics

SN - 1063-7842

IS - 12

ER -

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10.1134/S1063784214120214