Hard carbon coatings deposited by pulsed high current magnetron sputtering

Abstract

Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm³ N⁻¹ m⁻¹, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 10¹³ cm⁻³) plasma.

Original language	English
Pages (from-to)	1811-1814
Number of pages	4
Journal	Technical Physics
Volume	59
Issue number	12
DOIs	https://doi.org/10.1134/S1063784214120214
Publication status	Published - 1 Jan 2014

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Hard carbon coatings deposited by pulsed high current magnetron sputtering",

abstract = "Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm3 N−1 m−1, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 1013 cm−3) plasma.",

author = "Oskomov, {K. V.} and Solov{\textquoteright}ev, {A. A.} and Rabotkin, {S. V.}",

year = "2014",

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doi = "10.1134/S1063784214120214",

language = "English",

volume = "59",

pages = "1811--1814",

journal = "Technical Physics",

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AU - Oskomov, K. V.

AU - Solov’ev, A. A.

AU - Rabotkin, S. V.

PY - 2014/1/1

Y1 - 2014/1/1

N2 - Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm3 N−1 m−1, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 1013 cm−3) plasma.

AB - Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm3 N−1 m−1, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 1013 cm−3) plasma.

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