Abstract
This article reports on the relationship between the structure and mechanical properties of Zr-Ni-N nanocomposite films prepared by d.c.-reactive magnetron sputtering of a ZrNi (90/10 at.%) alloyed target in a mixture of Ar and N2 onto steel substrates using a planar round unbalanced magnetron with a diameter of 100 mm. The Zr-Ni-N nanocomposite films represent a new material of the type nc-MeN/metal composed of a hard nc-ZrN phase and a soft Ni phase, where nc- denotes the nanocrystalline phase of zirconium nitride. It was found that (i) there is a strong correlation between the structure of the film, the content of Ni in the nanocomposite and the film properties; (ii) Zr-Ni-N films can form superhard films with a high hardness up to 57 GPa; and (iii) Zr-Ni-N films with the same hardness (H > 40 GPa) can exhibit different structures and strongly differ in the size of nc-ZrNx grains of which they are composed. Therefore, the superhard coatings with a hardness of H > 40 GPa are characterized either by the strong reflection from large (20-50 nm) ZrNx grains with a preferential orientation or by many weak reflections from small, approximately 10 nm, ZrNx grains. General relationships between the microhardness H, the reduced Young's modulus E* = E/(1 - v2), and the elastic recovery We, determined from loading/unloading curves measured using a Fisherscope microhardness tester are given; here E and v are the Young's modulus and the Poisson's ratio, respectively. The ratio H3/E*2, which represents the resistance of the material to plastic deformation, is also given.
| Original language | English |
|---|---|
| Pages (from-to) | 101-109 |
| Number of pages | 9 |
| Journal | Surface and Coatings Technology |
| Volume | 139 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 May 2001 |
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Keywords
- Magnetron sputtering
- Mechanical properties
- Ne-ZrN/Ni Nanocomposite films
- Structure
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
Hard and superhard Zr-Ni-N nanocomposite films. / Musil, J.; Karvánková, P.; Kasl, J.
In: Surface and Coatings Technology, Vol. 139, No. 1, 01.05.2001, p. 101-109.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Hard and superhard Zr-Ni-N nanocomposite films
AU - Musil, J.
AU - Karvánková, P.
AU - Kasl, J.
PY - 2001/5/1
Y1 - 2001/5/1
N2 - This article reports on the relationship between the structure and mechanical properties of Zr-Ni-N nanocomposite films prepared by d.c.-reactive magnetron sputtering of a ZrNi (90/10 at.%) alloyed target in a mixture of Ar and N2 onto steel substrates using a planar round unbalanced magnetron with a diameter of 100 mm. The Zr-Ni-N nanocomposite films represent a new material of the type nc-MeN/metal composed of a hard nc-ZrN phase and a soft Ni phase, where nc- denotes the nanocrystalline phase of zirconium nitride. It was found that (i) there is a strong correlation between the structure of the film, the content of Ni in the nanocomposite and the film properties; (ii) Zr-Ni-N films can form superhard films with a high hardness up to 57 GPa; and (iii) Zr-Ni-N films with the same hardness (H > 40 GPa) can exhibit different structures and strongly differ in the size of nc-ZrNx grains of which they are composed. Therefore, the superhard coatings with a hardness of H > 40 GPa are characterized either by the strong reflection from large (20-50 nm) ZrNx grains with a preferential orientation or by many weak reflections from small, approximately 10 nm, ZrNx grains. General relationships between the microhardness H, the reduced Young's modulus E* = E/(1 - v2), and the elastic recovery We, determined from loading/unloading curves measured using a Fisherscope microhardness tester are given; here E and v are the Young's modulus and the Poisson's ratio, respectively. The ratio H3/E*2, which represents the resistance of the material to plastic deformation, is also given.
AB - This article reports on the relationship between the structure and mechanical properties of Zr-Ni-N nanocomposite films prepared by d.c.-reactive magnetron sputtering of a ZrNi (90/10 at.%) alloyed target in a mixture of Ar and N2 onto steel substrates using a planar round unbalanced magnetron with a diameter of 100 mm. The Zr-Ni-N nanocomposite films represent a new material of the type nc-MeN/metal composed of a hard nc-ZrN phase and a soft Ni phase, where nc- denotes the nanocrystalline phase of zirconium nitride. It was found that (i) there is a strong correlation between the structure of the film, the content of Ni in the nanocomposite and the film properties; (ii) Zr-Ni-N films can form superhard films with a high hardness up to 57 GPa; and (iii) Zr-Ni-N films with the same hardness (H > 40 GPa) can exhibit different structures and strongly differ in the size of nc-ZrNx grains of which they are composed. Therefore, the superhard coatings with a hardness of H > 40 GPa are characterized either by the strong reflection from large (20-50 nm) ZrNx grains with a preferential orientation or by many weak reflections from small, approximately 10 nm, ZrNx grains. General relationships between the microhardness H, the reduced Young's modulus E* = E/(1 - v2), and the elastic recovery We, determined from loading/unloading curves measured using a Fisherscope microhardness tester are given; here E and v are the Young's modulus and the Poisson's ratio, respectively. The ratio H3/E*2, which represents the resistance of the material to plastic deformation, is also given.
KW - Magnetron sputtering
KW - Mechanical properties
KW - Ne-ZrN/Ni Nanocomposite films
KW - Structure
UR - http://www.scopus.com/inward/record.url?scp=0035342251&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035342251&partnerID=8YFLogxK
U2 - 10.1016/S0257-8972(01)00989-6
DO - 10.1016/S0257-8972(01)00989-6
M3 - Article
VL - 139
SP - 101
EP - 109
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 1
ER -