Hard and superhard Zr-Ni-N nanocomposite films

J. Musil, P. Karvánková, J. Kasl

Research output: Contribution to journalArticle

97 Citations (Scopus)

Abstract

This article reports on the relationship between the structure and mechanical properties of Zr-Ni-N nanocomposite films prepared by d.c.-reactive magnetron sputtering of a ZrNi (90/10 at.%) alloyed target in a mixture of Ar and N2 onto steel substrates using a planar round unbalanced magnetron with a diameter of 100 mm. The Zr-Ni-N nanocomposite films represent a new material of the type nc-MeN/metal composed of a hard nc-ZrN phase and a soft Ni phase, where nc- denotes the nanocrystalline phase of zirconium nitride. It was found that (i) there is a strong correlation between the structure of the film, the content of Ni in the nanocomposite and the film properties; (ii) Zr-Ni-N films can form superhard films with a high hardness up to 57 GPa; and (iii) Zr-Ni-N films with the same hardness (H > 40 GPa) can exhibit different structures and strongly differ in the size of nc-ZrNx grains of which they are composed. Therefore, the superhard coatings with a hardness of H > 40 GPa are characterized either by the strong reflection from large (20-50 nm) ZrNx grains with a preferential orientation or by many weak reflections from small, approximately 10 nm, ZrNx grains. General relationships between the microhardness H, the reduced Young's modulus E* = E/(1 - v2), and the elastic recovery We, determined from loading/unloading curves measured using a Fisherscope microhardness tester are given; here E and v are the Young's modulus and the Poisson's ratio, respectively. The ratio H3/E*2, which represents the resistance of the material to plastic deformation, is also given.

Original languageEnglish
Pages (from-to)101-109
Number of pages9
JournalSurface and Coatings Technology
Volume139
Issue number1
DOIs
Publication statusPublished - 1 May 2001

Fingerprint

Nanocomposite films
nanocomposites
Hardness
Microhardness
hardness
Elastic moduli
microhardness
modulus of elasticity
Steel
Reactive sputtering
Poisson ratio
zirconium nitrides
Unloading
Zirconium
Nitrides
Magnetron sputtering
Plastic deformation
Nanocomposites
unloading
Metals

Keywords

  • Magnetron sputtering
  • Mechanical properties
  • Ne-ZrN/Ni Nanocomposite films
  • Structure

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Hard and superhard Zr-Ni-N nanocomposite films. / Musil, J.; Karvánková, P.; Kasl, J.

In: Surface and Coatings Technology, Vol. 139, No. 1, 01.05.2001, p. 101-109.

Research output: Contribution to journalArticle

Musil, J. ; Karvánková, P. ; Kasl, J. / Hard and superhard Zr-Ni-N nanocomposite films. In: Surface and Coatings Technology. 2001 ; Vol. 139, No. 1. pp. 101-109.
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