Abstract
The article reports on structure, mechanical properties and macrostress of Al-Cu-N films deposited by reactive sputtering using a do unbalanced magnetron equipped with a round planar aluminum target fixed to the magnetron cathode with a copper ring. A systematic investigation of sputtered films showed that: (i) Al-Cu-N is a new nanocomposite material which can form superhard (> 40 GPa) coatings with a maximum microhardness of approximately 48 GPa; (ii) Al-Cu-N can easily form a very fine-grained material; (iii) the size of grains decides on the macrostress in Al-Cu-N films; the Al-Cu-N films composed of grains with the average size of 9.5 nm exhibit a low (< 0.5 GPa) macrostress and, on the contrary, the Al-Cu-N films composed of larger (> 10 nm) grains exhibit large macrostress of several GPa; and (iv) the macrostress in Al-Cu-N films can be varied from tension to compression by the variation of the energy delivered to the growing film, i.e. by the ion bombardment and the substrate heating. The relationships between microhardness, H, Young's modulus, E, and elastic recovery, W e evaluated from loading/unloading curves measured using the microhardness tester Fisherscope H 100 are also given.
| Original language | English |
|---|---|
| Pages (from-to) | 603-609 |
| Number of pages | 7 |
| Journal | Surface and Coatings Technology |
| Volume | 142-144 |
| DOIs | |
| Publication status | Published - 1 Jul 2001 |
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Keywords
- Macrostress
- Magnetron sputtering
- Mechanical properties
- Nc-AlNx/Cu nanocomposite films
- Structure
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
Hard and superhard nanocomposite Al-Cu-N films prepared by magnetron sputtering. / Musil, J.; Hrubý, H.; Zeman, P.; Zeman, H.; Čerstvý, R.; Mayrhofer, P. H.; Mitterer, C.
In: Surface and Coatings Technology, Vol. 142-144, 01.07.2001, p. 603-609.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Hard and superhard nanocomposite Al-Cu-N films prepared by magnetron sputtering
AU - Musil, J.
AU - Hrubý, H.
AU - Zeman, P.
AU - Zeman, H.
AU - Čerstvý, R.
AU - Mayrhofer, P. H.
AU - Mitterer, C.
PY - 2001/7/1
Y1 - 2001/7/1
N2 - The article reports on structure, mechanical properties and macrostress of Al-Cu-N films deposited by reactive sputtering using a do unbalanced magnetron equipped with a round planar aluminum target fixed to the magnetron cathode with a copper ring. A systematic investigation of sputtered films showed that: (i) Al-Cu-N is a new nanocomposite material which can form superhard (> 40 GPa) coatings with a maximum microhardness of approximately 48 GPa; (ii) Al-Cu-N can easily form a very fine-grained material; (iii) the size of grains decides on the macrostress in Al-Cu-N films; the Al-Cu-N films composed of grains with the average size of 9.5 nm exhibit a low (< 0.5 GPa) macrostress and, on the contrary, the Al-Cu-N films composed of larger (> 10 nm) grains exhibit large macrostress of several GPa; and (iv) the macrostress in Al-Cu-N films can be varied from tension to compression by the variation of the energy delivered to the growing film, i.e. by the ion bombardment and the substrate heating. The relationships between microhardness, H, Young's modulus, E, and elastic recovery, W e evaluated from loading/unloading curves measured using the microhardness tester Fisherscope H 100 are also given.
AB - The article reports on structure, mechanical properties and macrostress of Al-Cu-N films deposited by reactive sputtering using a do unbalanced magnetron equipped with a round planar aluminum target fixed to the magnetron cathode with a copper ring. A systematic investigation of sputtered films showed that: (i) Al-Cu-N is a new nanocomposite material which can form superhard (> 40 GPa) coatings with a maximum microhardness of approximately 48 GPa; (ii) Al-Cu-N can easily form a very fine-grained material; (iii) the size of grains decides on the macrostress in Al-Cu-N films; the Al-Cu-N films composed of grains with the average size of 9.5 nm exhibit a low (< 0.5 GPa) macrostress and, on the contrary, the Al-Cu-N films composed of larger (> 10 nm) grains exhibit large macrostress of several GPa; and (iv) the macrostress in Al-Cu-N films can be varied from tension to compression by the variation of the energy delivered to the growing film, i.e. by the ion bombardment and the substrate heating. The relationships between microhardness, H, Young's modulus, E, and elastic recovery, W e evaluated from loading/unloading curves measured using the microhardness tester Fisherscope H 100 are also given.
KW - Macrostress
KW - Magnetron sputtering
KW - Mechanical properties
KW - Nc-AlNx/Cu nanocomposite films
KW - Structure
UR - http://www.scopus.com/inward/record.url?scp=0035387862&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035387862&partnerID=8YFLogxK
U2 - 10.1016/S0257-8972(01)01200-2
DO - 10.1016/S0257-8972(01)01200-2
M3 - Article
AN - SCOPUS:0035387862
VL - 142-144
SP - 603
EP - 609
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -