Hard amorphous nanocomposite coatings with oxidation resistance above 1000°C

J. Musil, J. Vlček, P. Zeman

Research output: Contribution to journalArticle

50 Citations (Scopus)

Abstract

This article reports on two classes of novel hard amorphous coatings: (a) Si3N4 MeNx coatings with high (≥50 vol.-%) content of Si3N4 phase; here Me=Zr, Ta, Ti, Mo, W, etc. and x=N/Me is the stoichiometry of MeNx metal nitride phase, and (b) Si-B-C-N coatings with strong covalent bonds. These nanocomposites exhibit high thermal stability against crystallisation and high oxidation resistance, both at temperatures considerably exceeding 1000°C. Hard amorphous coatings were prepared using reactive magnetron sputtering. Properties of sputtered coatings were characterised using the following techniques: X-ray diffraction, electron probe microanalysis, Rutherford backscattering spectrometry, elastic recoil detection, high resolution transmission electron microscopy, selected area electron diffraction, atomic force microscopy, microhardness tester Fischerscope H 100, differential scanning calorimetry and thermogravimetric analysis. It was found that hard amorphous coatings of both new systems exhibit excellent oxidation resistance at high temperatures about 1500 and 1700°C for amorphous Si3N4MeNx and Si-B-C-N coatings respectively.

Original languageEnglish
Pages (from-to)148-154
Number of pages7
JournalAdvances in Applied Ceramics
Volume107
Issue number3
DOIs
Publication statusPublished - 1 Jun 2008

Fingerprint

Oxidation resistance
Nanocomposites
Coatings
Covalent bonds
Reactive sputtering
Rutherford backscattering spectroscopy
Electron probe microanalysis
High resolution transmission electron microscopy
Crystallization
Electron diffraction
Nitrides
Stoichiometry
Magnetron sputtering
Microhardness
Spectrometry
Thermogravimetric analysis
Differential scanning calorimetry
Atomic force microscopy
Thermodynamic stability
Metals

Keywords

  • Amorphous nanostructure
  • High temperature stability
  • Magnetron cosputtering
  • Oxidation resistance
  • Si-B-C-N coatings
  • SiN/MeNx coatings

ASJC Scopus subject areas

  • Ceramics and Composites
  • Industrial and Manufacturing Engineering

Cite this

Hard amorphous nanocomposite coatings with oxidation resistance above 1000°C. / Musil, J.; Vlček, J.; Zeman, P.

In: Advances in Applied Ceramics, Vol. 107, No. 3, 01.06.2008, p. 148-154.

Research output: Contribution to journalArticle

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