Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance

Abstract

This article reports on a new class of amorphous a-Si₃N₄/MeN_x nanocomposite coatings with a high (≥50 vol.%) content of Si₃N₄ phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

Original language	English
Title of host publication	Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06
Editors	Masaaki Naka
Publisher	Trans Tech Publications Ltd
Pages	31-36
Number of pages	6
ISBN (Print)	9783908451334
DOIs	https://doi.org/10.4028/www.scientific.net/SSP.127.31 https://doi.org/10.4028/3-908451-33-7.31
Publication status	Published - 1 Jan 2007
Event	International Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006 - Osaka, Japan Duration: 18 May 2006 → 20 May 2006

Publication series

Name	Solid State Phenomena
Volume	127
ISSN (Electronic)	1662-9779

Conference

Conference	International Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006
Country	Japan
City	Osaka
Period	18.5.06 → 20.5.06

Keywords

a-SiN/MeN composites
DC reactive magnetron sputtering
Mechanical properties
Microstructure
Oxidation resistance
Structure
Surface morphology

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Materials Science(all)
Condensed Matter Physics

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Musil, J., & Zeman, P. (2007). Hard a-Si₃N₄/MeN_x nanocomposite coatings with high thermal stability and high oxidation resistance. In M. Naka (Ed.), Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06 (pp. 31-36). (Solid State Phenomena; Vol. 127). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31

Hard a-Si₃N₄/MeN_x nanocomposite coatings with high thermal stability and high oxidation resistance. / Musil, J.; Zeman, P.

Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. ed. / Masaaki Naka. Trans Tech Publications Ltd, 2007. p. 31-36 (Solid State Phenomena; Vol. 127).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Musil, J & Zeman, P 2007, Hard a-Si₃N₄/MeN_x nanocomposite coatings with high thermal stability and high oxidation resistance. in M Naka (ed.), Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. Solid State Phenomena, vol. 127, Trans Tech Publications Ltd, pp. 31-36, International Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006, Osaka, Japan, 18.5.06. https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31

Musil J, Zeman P. Hard a-Si₃N₄/MeN_x nanocomposite coatings with high thermal stability and high oxidation resistance. In Naka M, editor, Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. Trans Tech Publications Ltd. 2007. p. 31-36. (Solid State Phenomena). https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31

Musil, J. ; Zeman, P. / Hard a-Si₃N₄/MeN_x nanocomposite coatings with high thermal stability and high oxidation resistance. Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. editor / Masaaki Naka. Trans Tech Publications Ltd, 2007. pp. 31-36 (Solid State Phenomena).

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abstract = "This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.",

keywords = "a-SiN/MeN composites, DC reactive magnetron sputtering, Mechanical properties, Microstructure, Oxidation resistance, Structure, Surface morphology",

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N2 - This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

AB - This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

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Hard a-Si₃N₄/MeN_x nanocomposite coatings with high thermal stability and high oxidation resistance