Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance

J. Musil, P. Zeman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

31 Citations (Scopus)

Abstract

This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

Original languageEnglish
Title of host publicationDesigning of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06
EditorsMasaaki Naka
PublisherTrans Tech Publications Ltd
Pages31-36
Number of pages6
ISBN (Print)9783908451334
DOIs
Publication statusPublished - 1 Jan 2007
EventInternational Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006 - Osaka, Japan
Duration: 18 May 200620 May 2006

Publication series

NameSolid State Phenomena
Volume127
ISSN (Electronic)1662-9779

Conference

ConferenceInternational Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006
CountryJapan
CityOsaka
Period18.5.0620.5.06

Fingerprint

oxidation resistance
Oxidation resistance
Nanocomposites
nanocomposites
Thermodynamic stability
thermal stability
coatings
Coatings
Substrates
Crystallization
Metals
crystallization
silicon nitride
air
Air
metals
Temperature
temperature

Keywords

  • a-SiN/MeN composites
  • DC reactive magnetron sputtering
  • Mechanical properties
  • Microstructure
  • Oxidation resistance
  • Structure
  • Surface morphology

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Musil, J., & Zeman, P. (2007). Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. In M. Naka (Ed.), Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06 (pp. 31-36). (Solid State Phenomena; Vol. 127). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31

Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. / Musil, J.; Zeman, P.

Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. ed. / Masaaki Naka. Trans Tech Publications Ltd, 2007. p. 31-36 (Solid State Phenomena; Vol. 127).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Musil, J & Zeman, P 2007, Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. in M Naka (ed.), Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. Solid State Phenomena, vol. 127, Trans Tech Publications Ltd, pp. 31-36, International Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006, Osaka, Japan, 18.5.06. https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31
Musil J, Zeman P. Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. In Naka M, editor, Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. Trans Tech Publications Ltd. 2007. p. 31-36. (Solid State Phenomena). https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31
Musil, J. ; Zeman, P. / Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. editor / Masaaki Naka. Trans Tech Publications Ltd, 2007. pp. 31-36 (Solid State Phenomena).
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