Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance

J. Musil, P. Zeman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

34 Citations (Scopus)

Abstract

This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

Original languageEnglish
Title of host publicationDesigning of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06
EditorsMasaaki Naka
PublisherTrans Tech Publications Ltd
Pages31-36
Number of pages6
ISBN (Print)9783908451334
DOIs
Publication statusPublished - 1 Jan 2007
EventInternational Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006 - Osaka, Japan
Duration: 18 May 200620 May 2006

Publication series

NameSolid State Phenomena
Volume127
ISSN (Electronic)1662-9779

Conference

ConferenceInternational Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006
CountryJapan
CityOsaka
Period18.5.0620.5.06

Keywords

  • a-SiN/MeN composites
  • DC reactive magnetron sputtering
  • Mechanical properties
  • Microstructure
  • Oxidation resistance
  • Structure
  • Surface morphology

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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    Musil, J., & Zeman, P. (2007). Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. In M. Naka (Ed.), Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06 (pp. 31-36). (Solid State Phenomena; Vol. 127). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31