Abstract
This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.
| Original language | English |
|---|---|
| Title of host publication | Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06 |
| Editors | Masaaki Naka |
| Publisher | Trans Tech Publications Ltd |
| Pages | 31-36 |
| Number of pages | 6 |
| ISBN (Print) | 9783908451334 |
| DOIs | |
| Publication status | Published - 1 Jan 2007 |
| Event | International Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006 - Osaka, Japan Duration: 18 May 2006 → 20 May 2006 |
Publication series
| Name | Solid State Phenomena |
|---|---|
| Volume | 127 |
| ISSN (Electronic) | 1662-9779 |
Conference
| Conference | International Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006 |
|---|---|
| Country | Japan |
| City | Osaka |
| Period | 18.5.06 → 20.5.06 |
Fingerprint
Keywords
- a-SiN/MeN composites
- DC reactive magnetron sputtering
- Mechanical properties
- Microstructure
- Oxidation resistance
- Structure
- Surface morphology
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Materials Science(all)
- Condensed Matter Physics
Cite this
Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. / Musil, J.; Zeman, P.
Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. ed. / Masaaki Naka. Trans Tech Publications Ltd, 2007. p. 31-36 (Solid State Phenomena; Vol. 127).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance
AU - Musil, J.
AU - Zeman, P.
PY - 2007/1/1
Y1 - 2007/1/1
N2 - This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.
AB - This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.
KW - a-SiN/MeN composites
KW - DC reactive magnetron sputtering
KW - Mechanical properties
KW - Microstructure
KW - Oxidation resistance
KW - Structure
KW - Surface morphology
UR - http://www.scopus.com/inward/record.url?scp=84891812002&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891812002&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/SSP.127.31
DO - 10.4028/www.scientific.net/SSP.127.31
M3 - Conference contribution
SN - 9783908451334
T3 - Solid State Phenomena
SP - 31
EP - 36
BT - Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06
A2 - Naka, Masaaki
PB - Trans Tech Publications Ltd
ER -