Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina

Petr Pokorný, Jir̂í Bulír̂, Ján Lanĉok, Jindr̂ich Musil, Michal Novotný

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The paper is devoted to the investigation of ion composition of plasma of dc pulsed magnetron discharge generated by a magnetron with Al target in an Ar/O2 mixture. The magnetron discharge was investigated in the non-reactive, metallic and oxide mode of sputtering using a mass spectrometer. The amount and energies of neutral oxygen atoms O, positive O+ and O 2+ ions, and negative O- and O 2- ions were measured as a function of oxygen flow rate φO2, magnetron voltage Ud and constant power Pd = 400 W delivered to the magnetron discharge, repetition frequency of pulses fr = 10 kHz and the ratio of O 2 and Ar flow rates φO2Ar. The content of ions and radicals in magnetron discharge is compared with optical spectroscopy measurements. The obtained results give a deeper insight into reactive magnetron sputtering of oxide films.

Original languageEnglish
Pages (from-to)910-914
Number of pages5
JournalPlasma Processes and Polymers
Volume7
Issue number11
DOIs
Publication statusPublished - 23 Nov 2010

Fingerprint

Aluminum Oxide
Reactive sputtering
oxygen ions
negative ions
Alumina
aluminum oxides
sputtering
Ions
Oxygen
ions
flow velocity
Flow rate
Mass spectrometers
neutral atoms
Magnetron sputtering
Oxides
mass spectrometers
Oxide films
Sputtering
oxide films

Keywords

  • aluminium oxide
  • ion-energy distribution function
  • magnetron
  • mass spectrometry
  • pulsed discharges

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Polymers and Plastics

Cite this

Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina. / Pokorný, Petr; Bulír̂, Jir̂í; Lanĉok, Ján; Musil, Jindr̂ich; Novotný, Michal.

In: Plasma Processes and Polymers, Vol. 7, No. 11, 23.11.2010, p. 910-914.

Research output: Contribution to journalArticle

Pokorný, Petr ; Bulír̂, Jir̂í ; Lanĉok, Ján ; Musil, Jindr̂ich ; Novotný, Michal. / Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina. In: Plasma Processes and Polymers. 2010 ; Vol. 7, No. 11. pp. 910-914.
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