Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode

K. P. Savkin, Yu G. Yushkov, A. G. Nikolaev, E. M. Oks, G. Yu Yushkov

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

This paper presents the results of time-of-flight mass spectrometry studies of the elemental and mass-to-charge state compositions of metal ion beams produced by a vacuum arc ion source with compound cathode (WC- Co0.5, Cu- Cr0.25, Ti- Cu0.1). We found that the ion beam composition agrees well with the stoichiometric composition of the cathode material from which the beam is derived, and the maximum ion charge state of the different plasma components is determined by the ionization capability of electrons within the cathode spot plasma, which is common to all components. The beam mass-to-charge state spectrum from a compound cathode features a greater fraction of multiply charged ions for those materials with lower electron temperature in the vacuum arc cathode spot, and a smaller fraction for those with higher electron temperature within the spot. We propose a potential diagram method for determination of attainable ion charge states for all components of the compound cathodes.

Original languageEnglish
Article number02A501
JournalReview of Scientific Instruments
Volume81
Issue number2
DOIs
Publication statusPublished - 2010

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Ion sources
ion sources
Ion beams
Cathodes
arcs
cathodes
ion beams
Vacuum
vacuum
ion charge
Electron temperature
Ions
Chemical analysis
electron energy
Plasmas
Ionization
Mass spectrometry
Metal ions
metal ions
mass spectroscopy

ASJC Scopus subject areas

  • Instrumentation

Cite this

Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode. / Savkin, K. P.; Yushkov, Yu G.; Nikolaev, A. G.; Oks, E. M.; Yushkov, G. Yu.

In: Review of Scientific Instruments, Vol. 81, No. 2, 02A501, 2010.

Research output: Contribution to journalArticle

Savkin, K. P. ; Yushkov, Yu G. ; Nikolaev, A. G. ; Oks, E. M. ; Yushkov, G. Yu. / Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode. In: Review of Scientific Instruments. 2010 ; Vol. 81, No. 2.
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