Generation of boron ion beams by vacuum arc and planar magnetron ion sources

Alexey Bugaev, Valeria Frolova, Vasily Gushenets, Alexey Nikolaev, Efim Oks, Konstantin Savkin, Maxim Shandrikov, Alexey Vizir, Anatoly Yushkov, Boris Kadlubovich, Georgy Yushkov

Research output: Contribution to journalArticle

Abstract

Boron ions can be implanted not only in semiconductors such as silicon wafers but also in other materials and metal products, e.g., machine parts and tools, to increase their surface properties and therefore lifetime. The purity of boron ion beams for these purposes is not so critical as for semiconductor technologies. Here, we present experimental results on the generation of pulsed boron ion beams in vacuum arc and planar magnetron ion sources with pure boron and lanthanum hexaboride cathodes with emphasis on the mass-charge state composition of the ion beams.

Original languageEnglish
Article number103302
JournalReview of Scientific Instruments
Volume90
Issue number10
DOIs
Publication statusPublished - 1 Oct 2019

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Ion sources
ion sources
Ion beams
Boron
boron
arcs
ion beams
Vacuum
vacuum
Semiconductor materials
Machine components
Lanthanum
Silicon wafers
lanthanum
Machine tools
surface properties
Surface properties
purity
Cathodes
cathodes

ASJC Scopus subject areas

  • Instrumentation

Cite this

Bugaev, A., Frolova, V., Gushenets, V., Nikolaev, A., Oks, E., Savkin, K., ... Yushkov, G. (2019). Generation of boron ion beams by vacuum arc and planar magnetron ion sources. Review of Scientific Instruments, 90(10), [103302]. https://doi.org/10.1063/1.5125704

Generation of boron ion beams by vacuum arc and planar magnetron ion sources. / Bugaev, Alexey; Frolova, Valeria; Gushenets, Vasily; Nikolaev, Alexey; Oks, Efim; Savkin, Konstantin; Shandrikov, Maxim; Vizir, Alexey; Yushkov, Anatoly; Kadlubovich, Boris; Yushkov, Georgy.

In: Review of Scientific Instruments, Vol. 90, No. 10, 103302, 01.10.2019.

Research output: Contribution to journalArticle

Bugaev, A, Frolova, V, Gushenets, V, Nikolaev, A, Oks, E, Savkin, K, Shandrikov, M, Vizir, A, Yushkov, A, Kadlubovich, B & Yushkov, G 2019, 'Generation of boron ion beams by vacuum arc and planar magnetron ion sources', Review of Scientific Instruments, vol. 90, no. 10, 103302. https://doi.org/10.1063/1.5125704
Bugaev A, Frolova V, Gushenets V, Nikolaev A, Oks E, Savkin K et al. Generation of boron ion beams by vacuum arc and planar magnetron ion sources. Review of Scientific Instruments. 2019 Oct 1;90(10). 103302. https://doi.org/10.1063/1.5125704
Bugaev, Alexey ; Frolova, Valeria ; Gushenets, Vasily ; Nikolaev, Alexey ; Oks, Efim ; Savkin, Konstantin ; Shandrikov, Maxim ; Vizir, Alexey ; Yushkov, Anatoly ; Kadlubovich, Boris ; Yushkov, Georgy. / Generation of boron ion beams by vacuum arc and planar magnetron ion sources. In: Review of Scientific Instruments. 2019 ; Vol. 90, No. 10.
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