Frequency Modulated Mems Gyroscopes: Recent Developments, Challenges and Outlook

Giacomo Langfelder, Paolo Minotti, Valentina Zega, Claudia Comi, Cristiano R. Marra, Mauro Leoncini, Marco Bestetti

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

After more than ten years of researches by different groups, this work summarizes the various frequency-modulated techniques for microelectromechanical system (MEMS) based gyroscopes. It then focuses on the low-power integrated electronics for Lissajous FM angular rate sensors and on the conditions to guarantee high offset stability over temperature. Recent results in terms of scale-factor drift and offset drift over temperature on the first complete Lissajous yaw FM gyroscope with full digital output are reported.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages425-429
Number of pages5
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - Jun 2019
Externally publishedYes
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period23.6.1927.6.19

Keywords

  • frequency modulation
  • MEMS gyroscopes
  • stability

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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  • Cite this

    Langfelder, G., Minotti, P., Zega, V., Comi, C., Marra, C. R., Leoncini, M., & Bestetti, M. (2019). Frequency Modulated Mems Gyroscopes: Recent Developments, Challenges and Outlook. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 425-429). [8808613] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808613