Frequency-modulated MEMS accelerometers for wide dynamic range and ultra-low consumption

Giacomo Langfelder, Marco Bestetti, Matteo Zucchini, Cristiano R. Marra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The purpose of this paper is to review micro-electromechanical system (MEMS) based frequency-modulated (FM) accelerometers, from both a system and performance standpoint. After introducing the reasons behind the research developed in the last years on FM accelerometers, the paper compares different techniques for frequency modulation. A time-switched FM accelerometer is identified as a good candidate for applications that need wide full-scale range (FSR) and high stability at low consumption, with full 3-axis sensing.

Original languageEnglish
Title of host publication2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728116341
DOIs
Publication statusPublished - Oct 2019
Externally publishedYes
Event18th IEEE Sensors, SENSORS 2019 - Montreal, Canada
Duration: 27 Oct 201930 Oct 2019

Publication series

NameProceedings of IEEE Sensors
Volume2019-October
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference18th IEEE Sensors, SENSORS 2019
CountryCanada
CityMontreal
Period27.10.1930.10.19

Keywords

  • accelerometer
  • frequency modulation
  • low-power
  • MEMS
  • Pierce oscillator

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Langfelder, G., Bestetti, M., Zucchini, M., & Marra, C. R. (2019). Frequency-modulated MEMS accelerometers for wide dynamic range and ultra-low consumption. In 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings [8956536] (Proceedings of IEEE Sensors; Vol. 2019-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSORS43011.2019.8956536