Formation of silicon carbide and diamond nanoparticles in the surface layer of a silicon target during short-pulse carbon ion implantation

G. E. Remnev, Yu F. Ivanov, E. P. Naiden, M. S. Saltymakov, Andrey Vladimirovich Stepanov, V. F. Shtan'Ko

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7 Citations (Scopus)

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Physics & Astronomy