Formation of nanosized particles of silicon carbide and diamonds in surface layer of silicon target during short-pulsed implantation of carbon ions

G. E. Remnev, Yu F. Ivanov, E. P. Naiden, M. S. Saltymakov, Andrey Vladimirovich Stepanov, V. F. Shtanko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Physics & Astronomy