Formation of high-intensity axially symmetric and ribbon beams of low-energy metal ions

Research output: Contribution to journalArticle

Abstract

Low-energy metal ion beams are of considerable interest in developing a high-intensity implantation method that modifies the elemental composition, microstructure, and properties of various materials at depths many times exceeding the projective range of ions. This study presents the results of experiments on plasma-immersion formation followed by spherical and cylindrical ballistic focusing of aluminum and titanium ion beams. The features of the formation, transport, and ballistic focusing of an ion beam are discussed based on the parameters of the vacuum-arc plasma, conditions of its preliminary injection into the drift space and beam focusing, amplitude, duration, and frequency of the bias potential pulses. The optimal conditions to form high-intensity beams of metal ions purified from the macroparticle debris of a vacuum-arc with a current of higher than 1 A and a current density of up to 0.5 A/cm2 are determined.

Original languageEnglish
Article number013301
JournalReview of Scientific Instruments
Volume91
Issue number1
DOIs
Publication statusPublished - 1 Jan 2020

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Ion beams
ribbons
Metal ions
metal ions
ion beams
Ballistics
ballistics
Vacuum
Plasmas
vacuum
debris
Debris
plasma jets
submerging
energy
implantation
Current density
arcs
titanium
Titanium

ASJC Scopus subject areas

  • Instrumentation

Cite this

@article{19807ab9daf04bd680ca64f2768fe4c5,
title = "Formation of high-intensity axially symmetric and ribbon beams of low-energy metal ions",
abstract = "Low-energy metal ion beams are of considerable interest in developing a high-intensity implantation method that modifies the elemental composition, microstructure, and properties of various materials at depths many times exceeding the projective range of ions. This study presents the results of experiments on plasma-immersion formation followed by spherical and cylindrical ballistic focusing of aluminum and titanium ion beams. The features of the formation, transport, and ballistic focusing of an ion beam are discussed based on the parameters of the vacuum-arc plasma, conditions of its preliminary injection into the drift space and beam focusing, amplitude, duration, and frequency of the bias potential pulses. The optimal conditions to form high-intensity beams of metal ions purified from the macroparticle debris of a vacuum-arc with a current of higher than 1 A and a current density of up to 0.5 A/cm2 are determined.",
author = "Ryabchikov, {Alexander I.} and Sivin, {Denis O.} and Shevelev, {Alexey E.} and Modebadze, {Georgy S.}",
year = "2020",
month = "1",
day = "1",
doi = "10.1063/1.5128422",
language = "English",
volume = "91",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "1",

}

TY - JOUR

T1 - Formation of high-intensity axially symmetric and ribbon beams of low-energy metal ions

AU - Ryabchikov, Alexander I.

AU - Sivin, Denis O.

AU - Shevelev, Alexey E.

AU - Modebadze, Georgy S.

PY - 2020/1/1

Y1 - 2020/1/1

N2 - Low-energy metal ion beams are of considerable interest in developing a high-intensity implantation method that modifies the elemental composition, microstructure, and properties of various materials at depths many times exceeding the projective range of ions. This study presents the results of experiments on plasma-immersion formation followed by spherical and cylindrical ballistic focusing of aluminum and titanium ion beams. The features of the formation, transport, and ballistic focusing of an ion beam are discussed based on the parameters of the vacuum-arc plasma, conditions of its preliminary injection into the drift space and beam focusing, amplitude, duration, and frequency of the bias potential pulses. The optimal conditions to form high-intensity beams of metal ions purified from the macroparticle debris of a vacuum-arc with a current of higher than 1 A and a current density of up to 0.5 A/cm2 are determined.

AB - Low-energy metal ion beams are of considerable interest in developing a high-intensity implantation method that modifies the elemental composition, microstructure, and properties of various materials at depths many times exceeding the projective range of ions. This study presents the results of experiments on plasma-immersion formation followed by spherical and cylindrical ballistic focusing of aluminum and titanium ion beams. The features of the formation, transport, and ballistic focusing of an ion beam are discussed based on the parameters of the vacuum-arc plasma, conditions of its preliminary injection into the drift space and beam focusing, amplitude, duration, and frequency of the bias potential pulses. The optimal conditions to form high-intensity beams of metal ions purified from the macroparticle debris of a vacuum-arc with a current of higher than 1 A and a current density of up to 0.5 A/cm2 are determined.

UR - http://www.scopus.com/inward/record.url?scp=85077513079&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85077513079&partnerID=8YFLogxK

U2 - 10.1063/1.5128422

DO - 10.1063/1.5128422

M3 - Article

AN - SCOPUS:85077513079

VL - 91

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 1

M1 - 013301

ER -