Abstract
The effect of the insulator-conductor transition in magnesium oxide crystals implanted with Fe+ ions at doses ranging from 1016 to 1017 ions/cm2 (ion energy 70 keV) was investigated. It was found that the conductive state of MgO does not change on heating of the irradiated crystals up to 1300 K in vacuum. In contrast, heat treatment in air results in a decreasing value of the conductivity. The nature of point defects and their role in annealing processes are discussed on the basis of the optical absorption data. Supplementary data were obtained using the techniques of Rutherford backscattering and channeling of α-particles. It was shown that changes of stoichiometric composition of the ion-implanted layers play an important role in the insulator-conductor transition.
| Original language | English |
|---|---|
| Pages (from-to) | 1203-1206 |
| Number of pages | 4 |
| Journal | Nuclear Inst. and Methods in Physics Research, B |
| Volume | 80-81 |
| Issue number | PART 2 |
| DOIs | |
| Publication status | Published - 1993 |
Fingerprint
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Instrumentation
- Surfaces and Interfaces
Cite this
Formation of conductive layers on dielectric substrates by ion bombardment. / Pichugin, V. F.; Frangulian, T. S.; Kryuchkov, Yu Yu; Feodorov, A. N.; Riabchikov, A. I.
In: Nuclear Inst. and Methods in Physics Research, B, Vol. 80-81, No. PART 2, 1993, p. 1203-1206.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Formation of conductive layers on dielectric substrates by ion bombardment
AU - Pichugin, V. F.
AU - Frangulian, T. S.
AU - Kryuchkov, Yu Yu
AU - Feodorov, A. N.
AU - Riabchikov, A. I.
PY - 1993
Y1 - 1993
N2 - The effect of the insulator-conductor transition in magnesium oxide crystals implanted with Fe+ ions at doses ranging from 1016 to 1017 ions/cm2 (ion energy 70 keV) was investigated. It was found that the conductive state of MgO does not change on heating of the irradiated crystals up to 1300 K in vacuum. In contrast, heat treatment in air results in a decreasing value of the conductivity. The nature of point defects and their role in annealing processes are discussed on the basis of the optical absorption data. Supplementary data were obtained using the techniques of Rutherford backscattering and channeling of α-particles. It was shown that changes of stoichiometric composition of the ion-implanted layers play an important role in the insulator-conductor transition.
AB - The effect of the insulator-conductor transition in magnesium oxide crystals implanted with Fe+ ions at doses ranging from 1016 to 1017 ions/cm2 (ion energy 70 keV) was investigated. It was found that the conductive state of MgO does not change on heating of the irradiated crystals up to 1300 K in vacuum. In contrast, heat treatment in air results in a decreasing value of the conductivity. The nature of point defects and their role in annealing processes are discussed on the basis of the optical absorption data. Supplementary data were obtained using the techniques of Rutherford backscattering and channeling of α-particles. It was shown that changes of stoichiometric composition of the ion-implanted layers play an important role in the insulator-conductor transition.
UR - http://www.scopus.com/inward/record.url?scp=0040719243&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0040719243&partnerID=8YFLogxK
U2 - 10.1016/0168-583X(93)90766-Y
DO - 10.1016/0168-583X(93)90766-Y
M3 - Article
AN - SCOPUS:0040719243
VL - 80-81
SP - 1203
EP - 1206
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - PART 2
ER -