Formation of boron heavily-doped nanolayer in silicon by powerful ion irradiation

Andrey Kokhanenko, Alexander Korotaev, Alexander Voitsekhovskii, Ivan Grushin, Mikkail Opekunov, Gennady Remnev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Formation of boron heavily-doped nanolayer in silicon by powerful ion irradiation'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy