Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases

Research output: Contribution to journalConference article

Abstract

The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.

Original languageEnglish
Article number012016
JournalJournal of Physics: Conference Series
Volume1281
Issue number1
DOIs
Publication statusPublished - 12 Aug 2019
Event14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Russian Federation
Duration: 14 May 201916 May 2019

Fingerprint

calcium phosphates
activity (biology)
radio frequencies
magnetron sputtering
coatings
gases
strontium
chemical properties
magnesium
phosphates
sputtering
substitutes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

@article{9796cc87871047e99e42575fba4895ff,
title = "Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases",
abstract = "The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.",
author = "Fedotkin, {A. Y.} and Kozelskaya, {A. I.} and Tverdokhlebov, {S. I.}",
year = "2019",
month = "8",
day = "12",
doi = "10.1088/1742-6596/1281/1/012016",
language = "English",
volume = "1281",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",

}

TY - JOUR

T1 - Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases

AU - Fedotkin, A. Y.

AU - Kozelskaya, A. I.

AU - Tverdokhlebov, S. I.

PY - 2019/8/12

Y1 - 2019/8/12

N2 - The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.

AB - The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.

UR - http://www.scopus.com/inward/record.url?scp=85072201685&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85072201685&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1281/1/012016

DO - 10.1088/1742-6596/1281/1/012016

M3 - Conference article

VL - 1281

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012016

ER -