Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases

Research output: Contribution to journalConference article


The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.

Original languageEnglish
Article number012016
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 12 Aug 2019
Event14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Russian Federation
Duration: 14 May 201916 May 2019


ASJC Scopus subject areas

  • Physics and Astronomy(all)

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