The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 12 Aug 2019|
|Event||14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Russian Federation|
Duration: 14 May 2019 → 16 May 2019
ASJC Scopus subject areas
- Physics and Astronomy(all)