Formation of a Track Template during PETP Irradiation with High-Energy Helium Ions for the Template Synthesis of Regular Microstructures

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Abstract

The features of obtaining track membranes (TMs) with the help of a classical cyclotron situated at Tomsk Polytechnic University are discussed. It is demonstrated that TMs can be employed as templates. The results of research into columnar nanostructures formed with the help of a TM template are presented. The creation of regular microstructures is investigated using deep X-ray lithography with synchrotron radiation and templates made of track membranes.

Original languageEnglish
Pages (from-to)598-602
Number of pages5
JournalJournal of Surface Investigation
Volume12
Issue number3
DOIs
Publication statusPublished - 1 May 2018

Keywords

  • argon ions
  • helium ions
  • polyethylene terephthalate
  • synchrotron radiation
  • track membrane

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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