Flexible hydrophobic ZrN nitride films

J. Musil, S. Zenkin, Kos, R. Čerstvý, S. Haviar

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.

Original languageEnglish
Pages (from-to)34-38
Number of pages5
JournalVacuum
Volume131
DOIs
Publication statusPublished - 1 Sep 2016

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Keywords

  • Flexible
  • Hydrophobic
  • Magnetron sputtering
  • Nitride
  • Resistance to cracking

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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