Flexible hydrophobic ZrN nitride films

J. Musil, S. Zenkin, Kos, R. Čerstvý, S. Haviar

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.

Original languageEnglish
Pages (from-to)34-38
Number of pages5
JournalVacuum
Volume131
DOIs
Publication statusPublished - 1 Sep 2016

Fingerprint

Nitrides
nitrides
Electronegativity
metal compounds
Reactive sputtering
Hydrophobicity
hydrophobicity
Magnetron sputtering
magnetron sputtering
flexibility
Carbon
Metals
mechanical properties
Mechanical properties
optimization
carbon

Keywords

  • Flexible
  • Hydrophobic
  • Magnetron sputtering
  • Nitride
  • Resistance to cracking

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

Cite this

Flexible hydrophobic ZrN nitride films. / Musil, J.; Zenkin, S.; Kos; Čerstvý, R.; Haviar, S.

In: Vacuum, Vol. 131, 01.09.2016, p. 34-38.

Research output: Contribution to journalArticle

Musil, J. ; Zenkin, S. ; Kos ; Čerstvý, R. ; Haviar, S. / Flexible hydrophobic ZrN nitride films. In: Vacuum. 2016 ; Vol. 131. pp. 34-38.
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