Flexible hydrophobic ZrN nitride films

Abstract

This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.

Original language	English
Pages (from-to)	34-38
Number of pages	5
Journal	Vacuum
Volume	131
DOIs	https://doi.org/10.1016/j.vacuum.2016.05.020
Publication status	Published - 1 Sep 2016

Keywords

Flexible
Hydrophobic
Magnetron sputtering
Nitride
Resistance to cracking

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

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10.1016/j.vacuum.2016.05.020

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title = "Flexible hydrophobic ZrN nitride films",

abstract = "This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.",

keywords = "Flexible, Hydrophobic, Magnetron sputtering, Nitride, Resistance to cracking",

author = "J. Musil and S. Zenkin and Kos and R. {\v C}erstv{\'y} and S. Haviar",

year = "2016",

month = sep,

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doi = "10.1016/j.vacuum.2016.05.020",

language = "English",

volume = "131",

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AU - Musil, J.

AU - Zenkin, S.

AU - Kos,

AU - Čerstvý, R.

AU - Haviar, S.

PY - 2016/9/1

Y1 - 2016/9/1

N2 - This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.

AB - This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.

KW - Flexible

KW - Hydrophobic

KW - Magnetron sputtering

KW - Nitride

KW - Resistance to cracking

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