Abstract
This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.
| Original language | English |
|---|---|
| Pages (from-to) | 34-38 |
| Number of pages | 5 |
| Journal | Vacuum |
| Volume | 131 |
| DOIs | |
| Publication status | Published - 1 Sep 2016 |
Keywords
- Flexible
- Hydrophobic
- Magnetron sputtering
- Nitride
- Resistance to cracking
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
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Musil, J., Zenkin, S., Kos, Čerstvý, R., & Haviar, S. (2016). Flexible hydrophobic ZrN nitride films. Vacuum, 131, 34-38. https://doi.org/10.1016/j.vacuum.2016.05.020