Abstract
This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.
| Original language | English |
|---|---|
| Pages (from-to) | 34-38 |
| Number of pages | 5 |
| Journal | Vacuum |
| Volume | 131 |
| DOIs | |
| Publication status | Published - 1 Sep 2016 |
Fingerprint
Keywords
- Flexible
- Hydrophobic
- Magnetron sputtering
- Nitride
- Resistance to cracking
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
Cite this
Flexible hydrophobic ZrN nitride films. / Musil, J.; Zenkin, S.; Kos; Čerstvý, R.; Haviar, S.
In: Vacuum, Vol. 131, 01.09.2016, p. 34-38.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Flexible hydrophobic ZrN nitride films
AU - Musil, J.
AU - Zenkin, S.
AU - Kos,
AU - Čerstvý, R.
AU - Haviar, S.
PY - 2016/9/1
Y1 - 2016/9/1
N2 - This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.
AB - This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.
KW - Flexible
KW - Hydrophobic
KW - Magnetron sputtering
KW - Nitride
KW - Resistance to cracking
UR - http://www.scopus.com/inward/record.url?scp=84973098779&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84973098779&partnerID=8YFLogxK
U2 - 10.1016/j.vacuum.2016.05.020
DO - 10.1016/j.vacuum.2016.05.020
M3 - Article
AN - SCOPUS:84973098779
VL - 131
SP - 34
EP - 38
JO - Vacuum
JF - Vacuum
SN - 0042-207X
ER -