Flexible hard Al-Si-N films for high temperature operation

J. Musil, G. Remnev, V. Legostaev, V. Uglov, A. Lebedynskiy, A. Lauk, J. Procházka, S. Haviar, E. Smolyanskiy

Research output: Contribution to journalArticle

26 Citations (Scopus)

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Chemical Compounds

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