Filtering properties of the measurement base in the problems of profilometry

V. V. Demin, V. G. Maksimov, I. G. Polovtsev

Research output: Contribution to journalArticle

Abstract

It is shown that maximally reliable information about the characteristic sizes of a studied surface profile can be obtained by the choice of measurement base size. A mathematical filter model is given that allows one to develop algorithms of allowance for the filtering base properties for concrete cases. The expressions are used for numerical modeling of the reconstruction process of surface profile on an example of harmonic and quasiharmonic signals. The recommendations are given for determination of the realization length of a processed signal to achieve the required reconstruction accuracy.

Original languageEnglish
Pages (from-to)74-81
Number of pages8
JournalAvtometriya
Issue number6
Publication statusPublished - 1 Dec 2000
Externally publishedYes

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ASJC Scopus subject areas

  • Software
  • Control and Systems Engineering

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