Features of magnetic compression model as applied to EUV source based on a pseudospark discharge

N. V. Landl, Yu D. Korolev, O. B. Frants, V. G. Geyman, I. A. Shemyakin, A. V. Bolotov

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    It is shown that the magnetic compression zero-dimensional model can't be applied for simulation of the discharge dynamic in the source of EUV radiation based on a pseudospark discharge. Qualitative explanation of the occurrence of radiating area is given.

    Original languageEnglish
    Title of host publicationProceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
    Pages584-587
    Number of pages4
    DOIs
    Publication statusPublished - 2012
    Event25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012 - Tomsk, Russian Federation
    Duration: 2 Sep 20127 Sep 2012

    Other

    Other25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012
    CountryRussian Federation
    CityTomsk
    Period2.9.127.9.12

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    ASJC Scopus subject areas

    • Computer Networks and Communications
    • Software

    Cite this

    Landl, N. V., Korolev, Y. D., Frants, O. B., Geyman, V. G., Shemyakin, I. A., & Bolotov, A. V. (2012). Features of magnetic compression model as applied to EUV source based on a pseudospark discharge. In Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV (pp. 584-587). [6412587] https://doi.org/10.1109/DEIV.2012.6412587