Features of magnetic compression model as applied to EUV source based on a pseudospark discharge

Abstract

It is shown that the magnetic compression zero-dimensional model can't be applied for simulation of the discharge dynamic in the source of EUV radiation based on a pseudospark discharge. Qualitative explanation of the occurrence of radiating area is given.

Original language	English
Title of host publication	Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Pages	584-587
Number of pages	4
DOIs	https://doi.org/10.1109/DEIV.2012.6412587
Publication status	Published - 2012
Event	25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012 - Tomsk, Russian Federation Duration: 2 Sep 2012 → 7 Sep 2012

Other

Other	25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012
Country	Russian Federation
City	Tomsk
Period	2.9.12 → 7.9.12

ASJC Scopus subject areas

Computer Networks and Communications
Software

Access to Document

10.1109/DEIV.2012.6412587

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Features of magnetic compression model as applied to EUV source based on a pseudospark discharge. / Landl, N. V.; Korolev, Yu D.; Frants, O. B.; Geyman, V. G.; Shemyakin, I. A.; Bolotov, A. V.

Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. 2012. p. 584-587 6412587.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Landl, NV, Korolev, YD, Frants, OB, Geyman, VG, Shemyakin, IA & Bolotov, AV 2012, Features of magnetic compression model as applied to EUV source based on a pseudospark discharge. in Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV., 6412587, pp. 584-587, 25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012, Tomsk, Russian Federation, 2.9.12. https://doi.org/10.1109/DEIV.2012.6412587

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abstract = "It is shown that the magnetic compression zero-dimensional model can't be applied for simulation of the discharge dynamic in the source of EUV radiation based on a pseudospark discharge. Qualitative explanation of the occurrence of radiating area is given.",

author = "Landl, {N. V.} and Korolev, {Yu D.} and Frants, {O. B.} and Geyman, {V. G.} and Shemyakin, {I. A.} and Bolotov, {A. V.}",

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AU - Shemyakin, I. A.

AU - Bolotov, A. V.

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