Abstract
It is shown that the magnetic compression zero-dimensional model can't be applied for simulation of the discharge dynamic in the source of EUV radiation based on a pseudospark discharge. Qualitative explanation of the occurrence of radiating area is given.
Original language | English |
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Title of host publication | Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV |
Pages | 584-587 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2012 |
Event | 25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012 - Tomsk, Russian Federation Duration: 2 Sep 2012 → 7 Sep 2012 |
Other
Other | 25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012 |
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Country | Russian Federation |
City | Tomsk |
Period | 2.9.12 → 7.9.12 |
ASJC Scopus subject areas
- Computer Networks and Communications
- Software