Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target

G. A. Bleykher, A. O. Borduleva, A. V. Yuryeva, V. P. Krivobokov, J. Lančok, J. Bulíř, J. Drahokoupil, L. Klimša, J. Kopeček, L. Fekete, R. Čtvrtlìk, J. Tomaštik

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15 Citations (Scopus)

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