Abstract
Diffractive optics for hard X-rays feature superior properties in terms of resolution and efficiency, if volume diffraction effects are exploited all-over the aperture. For multilayer Laue lenses, preferably a wedged geometry is required to obtain this effect. We present an approach utilizing an additional stress layer to realize the necessary geometrical modifications where each lens can be customized to a selected photon energy independently of the given multilayer deposition. The quality of the deposition of the stress layer is evaluated using a laboratory X-ray microscope prior to its application at synchrotron radiation facilities with a special approach to measure the relative layer tilt at high spatial resolution.
| Original language | English |
|---|---|
| Pages (from-to) | 321-324 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 571 |
| Issue number | P2 |
| DOIs | |
| Publication status | Published - 28 Nov 2014 |
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Keywords
- Diffractive optics
- Focused ion beam
- Multilayers Stress layer
- Sputter deposition
- X-ray microscopy
- X-ray optics
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
Cite this
Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer. / Niese, Sven; Krüger, Peter; Kubec, Adam; Laas, Roman; Gawlitza, Peter; Melzer, Kathleen; Braun, Stefan; Zschech, Ehrenfried.
In: Thin Solid Films, Vol. 571, No. P2, 28.11.2014, p. 321-324.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer
AU - Niese, Sven
AU - Krüger, Peter
AU - Kubec, Adam
AU - Laas, Roman
AU - Gawlitza, Peter
AU - Melzer, Kathleen
AU - Braun, Stefan
AU - Zschech, Ehrenfried
PY - 2014/11/28
Y1 - 2014/11/28
N2 - Diffractive optics for hard X-rays feature superior properties in terms of resolution and efficiency, if volume diffraction effects are exploited all-over the aperture. For multilayer Laue lenses, preferably a wedged geometry is required to obtain this effect. We present an approach utilizing an additional stress layer to realize the necessary geometrical modifications where each lens can be customized to a selected photon energy independently of the given multilayer deposition. The quality of the deposition of the stress layer is evaluated using a laboratory X-ray microscope prior to its application at synchrotron radiation facilities with a special approach to measure the relative layer tilt at high spatial resolution.
AB - Diffractive optics for hard X-rays feature superior properties in terms of resolution and efficiency, if volume diffraction effects are exploited all-over the aperture. For multilayer Laue lenses, preferably a wedged geometry is required to obtain this effect. We present an approach utilizing an additional stress layer to realize the necessary geometrical modifications where each lens can be customized to a selected photon energy independently of the given multilayer deposition. The quality of the deposition of the stress layer is evaluated using a laboratory X-ray microscope prior to its application at synchrotron radiation facilities with a special approach to measure the relative layer tilt at high spatial resolution.
KW - Diffractive optics
KW - Focused ion beam
KW - Multilayers Stress layer
KW - Sputter deposition
KW - X-ray microscopy
KW - X-ray optics
UR - http://www.scopus.com/inward/record.url?scp=84919845599&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84919845599&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2014.02.095
DO - 10.1016/j.tsf.2014.02.095
M3 - Article
AN - SCOPUS:84919845599
VL - 571
SP - 321
EP - 324
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - P2
ER -