Abstract
Diffractive optics for hard X-rays feature superior properties in terms of resolution and efficiency, if volume diffraction effects are exploited all-over the aperture. For multilayer Laue lenses, preferably a wedged geometry is required to obtain this effect. We present an approach utilizing an additional stress layer to realize the necessary geometrical modifications where each lens can be customized to a selected photon energy independently of the given multilayer deposition. The quality of the deposition of the stress layer is evaluated using a laboratory X-ray microscope prior to its application at synchrotron radiation facilities with a special approach to measure the relative layer tilt at high spatial resolution.
Original language | English |
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Pages (from-to) | 321-324 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 571 |
Issue number | P2 |
DOIs | |
Publication status | Published - 28 Nov 2014 |
Keywords
- Diffractive optics
- Focused ion beam
- Multilayers Stress layer
- Sputter deposition
- X-ray microscopy
- X-ray optics
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry