Experimental study on a long pulse excimer laser system

Jingru Liu, Xueqing Zhao, Aiping Yi, Yongsheng Zhang, Li Yu, Lianying Ma, Ke Huang, Ying Tang, Xin Huang, Chao Huang, Hang Qian, Hengqi Hua, Xiaoxia An, Guoxing Zheng, Weiwei Xiao, Xisheng Ye, V. F. Losev, B. M. Kovalchuk, V. F. Tarasenko, Yu N. Panchenko & 7 others N. G. Ivanov, V. B. Zorin, V. S. Skakun, I. N. Konovalov, A. N. Panchenko, E. N. Abdullin, V. S. Tolkachev

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    5 Citations (Scopus)

    Abstract

    A four-stage XeCl laser system named Photons has been developed for studying the laser interaction with materials. The Photons are outlined and preliminary results characterizing the system are given. The master oscillator Photon-1 can provide "seed" light with laser energy of about 40mJ, pulse duration of about 250ns and good beam quality of nearly diffraction-limited divergence angle and narrow line width less than 1 cm -1 for whole system. The output energy of laser system of 251J has been obtained by four-stage amplification. The synchronization among five lasers is realized by the combination of low voltage timer, high voltage synchronic generators and compensated cables. The demonstration shows Photons good operation with low jitter of less than ±20ns.

    Original languageEnglish
    Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
    EditorsD. Fan, K.-I. Ueda, J. Lee
    Pages242-246
    Number of pages5
    Volume5627
    DOIs
    Publication statusPublished - 2005
    EventHigh-Power Lasers and Applications III - Beijing, China
    Duration: 8 Nov 200411 Nov 2004

    Other

    OtherHigh-Power Lasers and Applications III
    CountryChina
    CityBeijing
    Period8.11.0411.11.04

    Fingerprint

    Excimer lasers
    excimer lasers
    Laser pulses
    Photons
    Lasers
    pulses
    lasers
    photons
    voltage generators
    timing devices
    Beam quality
    Electric potential
    Jitter
    Linewidth
    low voltage
    cables
    Amplification
    Seed
    seeds
    high voltages

    Keywords

    • Excimer laser
    • Long pulse
    • MOPA
    • Synchronization

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Condensed Matter Physics

    Cite this

    Liu, J., Zhao, X., Yi, A., Zhang, Y., Yu, L., Ma, L., ... Tolkachev, V. S. (2005). Experimental study on a long pulse excimer laser system. In D. Fan, K-I. Ueda, & J. Lee (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5627, pp. 242-246). [52] https://doi.org/10.1117/12.580373

    Experimental study on a long pulse excimer laser system. / Liu, Jingru; Zhao, Xueqing; Yi, Aiping; Zhang, Yongsheng; Yu, Li; Ma, Lianying; Huang, Ke; Tang, Ying; Huang, Xin; Huang, Chao; Qian, Hang; Hua, Hengqi; An, Xiaoxia; Zheng, Guoxing; Xiao, Weiwei; Ye, Xisheng; Losev, V. F.; Kovalchuk, B. M.; Tarasenko, V. F.; Panchenko, Yu N.; Ivanov, N. G.; Zorin, V. B.; Skakun, V. S.; Konovalov, I. N.; Panchenko, A. N.; Abdullin, E. N.; Tolkachev, V. S.

    Proceedings of SPIE - The International Society for Optical Engineering. ed. / D. Fan; K.-I. Ueda; J. Lee. Vol. 5627 2005. p. 242-246 52.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Liu, J, Zhao, X, Yi, A, Zhang, Y, Yu, L, Ma, L, Huang, K, Tang, Y, Huang, X, Huang, C, Qian, H, Hua, H, An, X, Zheng, G, Xiao, W, Ye, X, Losev, VF, Kovalchuk, BM, Tarasenko, VF, Panchenko, YN, Ivanov, NG, Zorin, VB, Skakun, VS, Konovalov, IN, Panchenko, AN, Abdullin, EN & Tolkachev, VS 2005, Experimental study on a long pulse excimer laser system. in D Fan, K-I Ueda & J Lee (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5627, 52, pp. 242-246, High-Power Lasers and Applications III, Beijing, China, 8.11.04. https://doi.org/10.1117/12.580373
    Liu J, Zhao X, Yi A, Zhang Y, Yu L, Ma L et al. Experimental study on a long pulse excimer laser system. In Fan D, Ueda K-I, Lee J, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5627. 2005. p. 242-246. 52 https://doi.org/10.1117/12.580373
    Liu, Jingru ; Zhao, Xueqing ; Yi, Aiping ; Zhang, Yongsheng ; Yu, Li ; Ma, Lianying ; Huang, Ke ; Tang, Ying ; Huang, Xin ; Huang, Chao ; Qian, Hang ; Hua, Hengqi ; An, Xiaoxia ; Zheng, Guoxing ; Xiao, Weiwei ; Ye, Xisheng ; Losev, V. F. ; Kovalchuk, B. M. ; Tarasenko, V. F. ; Panchenko, Yu N. ; Ivanov, N. G. ; Zorin, V. B. ; Skakun, V. S. ; Konovalov, I. N. ; Panchenko, A. N. ; Abdullin, E. N. ; Tolkachev, V. S. / Experimental study on a long pulse excimer laser system. Proceedings of SPIE - The International Society for Optical Engineering. editor / D. Fan ; K.-I. Ueda ; J. Lee. Vol. 5627 2005. pp. 242-246
    @inproceedings{0423396ccb694a0e8890a3c14d99dd5b,
    title = "Experimental study on a long pulse excimer laser system",
    abstract = "A four-stage XeCl laser system named Photons has been developed for studying the laser interaction with materials. The Photons are outlined and preliminary results characterizing the system are given. The master oscillator Photon-1 can provide {"}seed{"} light with laser energy of about 40mJ, pulse duration of about 250ns and good beam quality of nearly diffraction-limited divergence angle and narrow line width less than 1 cm -1 for whole system. The output energy of laser system of 251J has been obtained by four-stage amplification. The synchronization among five lasers is realized by the combination of low voltage timer, high voltage synchronic generators and compensated cables. The demonstration shows Photons good operation with low jitter of less than ±20ns.",
    keywords = "Excimer laser, Long pulse, MOPA, Synchronization",
    author = "Jingru Liu and Xueqing Zhao and Aiping Yi and Yongsheng Zhang and Li Yu and Lianying Ma and Ke Huang and Ying Tang and Xin Huang and Chao Huang and Hang Qian and Hengqi Hua and Xiaoxia An and Guoxing Zheng and Weiwei Xiao and Xisheng Ye and Losev, {V. F.} and Kovalchuk, {B. M.} and Tarasenko, {V. F.} and Panchenko, {Yu N.} and Ivanov, {N. G.} and Zorin, {V. B.} and Skakun, {V. S.} and Konovalov, {I. N.} and Panchenko, {A. N.} and Abdullin, {E. N.} and Tolkachev, {V. S.}",
    year = "2005",
    doi = "10.1117/12.580373",
    language = "English",
    volume = "5627",
    pages = "242--246",
    editor = "D. Fan and K.-I. Ueda and J. Lee",
    booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

    }

    TY - GEN

    T1 - Experimental study on a long pulse excimer laser system

    AU - Liu, Jingru

    AU - Zhao, Xueqing

    AU - Yi, Aiping

    AU - Zhang, Yongsheng

    AU - Yu, Li

    AU - Ma, Lianying

    AU - Huang, Ke

    AU - Tang, Ying

    AU - Huang, Xin

    AU - Huang, Chao

    AU - Qian, Hang

    AU - Hua, Hengqi

    AU - An, Xiaoxia

    AU - Zheng, Guoxing

    AU - Xiao, Weiwei

    AU - Ye, Xisheng

    AU - Losev, V. F.

    AU - Kovalchuk, B. M.

    AU - Tarasenko, V. F.

    AU - Panchenko, Yu N.

    AU - Ivanov, N. G.

    AU - Zorin, V. B.

    AU - Skakun, V. S.

    AU - Konovalov, I. N.

    AU - Panchenko, A. N.

    AU - Abdullin, E. N.

    AU - Tolkachev, V. S.

    PY - 2005

    Y1 - 2005

    N2 - A four-stage XeCl laser system named Photons has been developed for studying the laser interaction with materials. The Photons are outlined and preliminary results characterizing the system are given. The master oscillator Photon-1 can provide "seed" light with laser energy of about 40mJ, pulse duration of about 250ns and good beam quality of nearly diffraction-limited divergence angle and narrow line width less than 1 cm -1 for whole system. The output energy of laser system of 251J has been obtained by four-stage amplification. The synchronization among five lasers is realized by the combination of low voltage timer, high voltage synchronic generators and compensated cables. The demonstration shows Photons good operation with low jitter of less than ±20ns.

    AB - A four-stage XeCl laser system named Photons has been developed for studying the laser interaction with materials. The Photons are outlined and preliminary results characterizing the system are given. The master oscillator Photon-1 can provide "seed" light with laser energy of about 40mJ, pulse duration of about 250ns and good beam quality of nearly diffraction-limited divergence angle and narrow line width less than 1 cm -1 for whole system. The output energy of laser system of 251J has been obtained by four-stage amplification. The synchronization among five lasers is realized by the combination of low voltage timer, high voltage synchronic generators and compensated cables. The demonstration shows Photons good operation with low jitter of less than ±20ns.

    KW - Excimer laser

    KW - Long pulse

    KW - MOPA

    KW - Synchronization

    UR - http://www.scopus.com/inward/record.url?scp=21044447590&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=21044447590&partnerID=8YFLogxK

    U2 - 10.1117/12.580373

    DO - 10.1117/12.580373

    M3 - Conference contribution

    VL - 5627

    SP - 242

    EP - 246

    BT - Proceedings of SPIE - The International Society for Optical Engineering

    A2 - Fan, D.

    A2 - Ueda, K.-I.

    A2 - Lee, J.

    ER -