This paper reports on the results of an experimental investigation of the modification of TiN coatings by a combined beam of aluminum and boron ions. A model of the surface treatment process is formulated taking into account the main physicochemical phenomena responsible for changes in the phase composition and structure of the coating. The model parameters are evaluated. It is demonstrated that the model is in qualitative agreement with the experimental data.
ASJC Scopus subject areas
- Surfaces, Coatings and Films