Evolution of the grain structure in the layer of Zr-Y-O in multilayer coating on the basis of Zr-Y-O/Si-Al-N at a high temperature in the "in-situ" observation

The deposition of nanostructured Zr-Y-O/Si-Al-N-based coatings was implemented by the pulse magnetron methods. The structural-phase state of the nanostructured coatings was studied with TEM and X-ray analyses. It has been established by TEM that coatings on the basis of Zr-Y-O have a nanograin column structure where the columns are spread through the entire coating thickness. At heating the layer in the TEM column in the "in-situ" mode one can observe the martensitic transition of the tetragonal phase to the monoclinic one in temperature interval of 400-500°C, the grain size decreases compared with the initial grain size in the coating, the modification of the grain boundaries, i.e. their total length increases, the form of the grains changes, in initial column grains there are cross boundaries, which suggest the fragmentation of grains.