EUV radiation from plasma of a pseudospark discharge in its different stages

Yu D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, N. V. Landl, I. A. Shemyakin

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    The paper describes the main features of the pulsed low-pressure gas discharge in oxygen and xenon, which burns in typical conditions of EUV source operation. It is shown that in a mode of the superdense glow discharge the electron temperature in the discharge plasma is high enough to provide for generation of EUV radiation without magnetic compression of the plasma column.

    Original languageEnglish
    Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
    EditorsK.A. Valiev, A.A. Orlikovsky
    Pages16-21
    Number of pages6
    Volume5401
    DOIs
    Publication statusPublished - 2004
    EventMicro- and Nanoelectronics 2003 - Zvenigorod
    Duration: 6 Oct 200310 Oct 2003

    Other

    OtherMicro- and Nanoelectronics 2003
    CityZvenigorod
    Period6.10.0310.10.03

    Fingerprint

    magnetic compression
    burn-in
    gas discharges
    glow discharges
    xenon
    plasma jets
    low pressure
    electron energy
    Plasmas
    Radiation
    Electron temperature
    Xenon
    Glow discharges
    oxygen
    radiation
    Discharge (fluid mechanics)
    Oxygen
    Gases

    Keywords

    • Arc
    • Dense glow discharge
    • EUV radiation
    • Pseudospark discharge
    • Superdense glow discharge

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Condensed Matter Physics

    Cite this

    Korolev, Y. D., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, N. V., & Shemyakin, I. A. (2004). EUV radiation from plasma of a pseudospark discharge in its different stages. In K. A. Valiev, & A. A. Orlikovsky (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5401, pp. 16-21) https://doi.org/10.1117/12.556972

    EUV radiation from plasma of a pseudospark discharge in its different stages. / Korolev, Yu D.; Frants, O. B.; Geyman, V. G.; Ivashov, R. V.; Landl, N. V.; Shemyakin, I. A.

    Proceedings of SPIE - The International Society for Optical Engineering. ed. / K.A. Valiev; A.A. Orlikovsky. Vol. 5401 2004. p. 16-21.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Korolev, YD, Frants, OB, Geyman, VG, Ivashov, RV, Landl, NV & Shemyakin, IA 2004, EUV radiation from plasma of a pseudospark discharge in its different stages. in KA Valiev & AA Orlikovsky (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5401, pp. 16-21, Micro- and Nanoelectronics 2003, Zvenigorod, 6.10.03. https://doi.org/10.1117/12.556972
    Korolev YD, Frants OB, Geyman VG, Ivashov RV, Landl NV, Shemyakin IA. EUV radiation from plasma of a pseudospark discharge in its different stages. In Valiev KA, Orlikovsky AA, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5401. 2004. p. 16-21 https://doi.org/10.1117/12.556972
    Korolev, Yu D. ; Frants, O. B. ; Geyman, V. G. ; Ivashov, R. V. ; Landl, N. V. ; Shemyakin, I. A. / EUV radiation from plasma of a pseudospark discharge in its different stages. Proceedings of SPIE - The International Society for Optical Engineering. editor / K.A. Valiev ; A.A. Orlikovsky. Vol. 5401 2004. pp. 16-21
    @inproceedings{38cd364baa6043e3bea16231f105abd8,
    title = "EUV radiation from plasma of a pseudospark discharge in its different stages",
    abstract = "The paper describes the main features of the pulsed low-pressure gas discharge in oxygen and xenon, which burns in typical conditions of EUV source operation. It is shown that in a mode of the superdense glow discharge the electron temperature in the discharge plasma is high enough to provide for generation of EUV radiation without magnetic compression of the plasma column.",
    keywords = "Arc, Dense glow discharge, EUV radiation, Pseudospark discharge, Superdense glow discharge",
    author = "Korolev, {Yu D.} and Frants, {O. B.} and Geyman, {V. G.} and Ivashov, {R. V.} and Landl, {N. V.} and Shemyakin, {I. A.}",
    year = "2004",
    doi = "10.1117/12.556972",
    language = "English",
    volume = "5401",
    pages = "16--21",
    editor = "K.A. Valiev and A.A. Orlikovsky",
    booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

    }

    TY - GEN

    T1 - EUV radiation from plasma of a pseudospark discharge in its different stages

    AU - Korolev, Yu D.

    AU - Frants, O. B.

    AU - Geyman, V. G.

    AU - Ivashov, R. V.

    AU - Landl, N. V.

    AU - Shemyakin, I. A.

    PY - 2004

    Y1 - 2004

    N2 - The paper describes the main features of the pulsed low-pressure gas discharge in oxygen and xenon, which burns in typical conditions of EUV source operation. It is shown that in a mode of the superdense glow discharge the electron temperature in the discharge plasma is high enough to provide for generation of EUV radiation without magnetic compression of the plasma column.

    AB - The paper describes the main features of the pulsed low-pressure gas discharge in oxygen and xenon, which burns in typical conditions of EUV source operation. It is shown that in a mode of the superdense glow discharge the electron temperature in the discharge plasma is high enough to provide for generation of EUV radiation without magnetic compression of the plasma column.

    KW - Arc

    KW - Dense glow discharge

    KW - EUV radiation

    KW - Pseudospark discharge

    KW - Superdense glow discharge

    UR - http://www.scopus.com/inward/record.url?scp=3843072028&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=3843072028&partnerID=8YFLogxK

    U2 - 10.1117/12.556972

    DO - 10.1117/12.556972

    M3 - Conference contribution

    VL - 5401

    SP - 16

    EP - 21

    BT - Proceedings of SPIE - The International Society for Optical Engineering

    A2 - Valiev, K.A.

    A2 - Orlikovsky, A.A.

    ER -