Abstract
A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.
Original language | English |
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Pages (from-to) | 1309-1316 |
Number of pages | 8 |
Journal | Russian Physics Journal |
Volume | 52 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2009 |
Keywords
- Growing coating
- Mechanical stresses
ASJC Scopus subject areas
- Physics and Astronomy(all)