Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.

Original languageEnglish
Pages (from-to)1309-1316
Number of pages8
JournalRussian Physics Journal
Volume52
Issue number12
DOIs
Publication statusPublished - 2009

Fingerprint

flat plates
coatings
mathematical models
magnetron sputtering
mechanical properties
kinetics
estimates

Keywords

  • Growing coating
  • Mechanical stresses

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

@article{b489d2fa651a4b3b8fc155bf565092cf,
title = "Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions",
abstract = "A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.",
keywords = "Growing coating, Mechanical stresses",
author = "Sorokova, {S. N.} and Knyazeva, {A. G.}",
year = "2009",
doi = "10.1007/s11182-010-9372-7",
language = "English",
volume = "52",
pages = "1309--1316",
journal = "Russian Physics Journal",
issn = "1064-8887",
publisher = "Consultants Bureau",
number = "12",

}

TY - JOUR

T1 - Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions

AU - Sorokova, S. N.

AU - Knyazeva, A. G.

PY - 2009

Y1 - 2009

N2 - A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.

AB - A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.

KW - Growing coating

KW - Mechanical stresses

UR - http://www.scopus.com/inward/record.url?scp=77953542523&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77953542523&partnerID=8YFLogxK

U2 - 10.1007/s11182-010-9372-7

DO - 10.1007/s11182-010-9372-7

M3 - Article

AN - SCOPUS:77953542523

VL - 52

SP - 1309

EP - 1316

JO - Russian Physics Journal

JF - Russian Physics Journal

SN - 1064-8887

IS - 12

ER -