Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions

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8 Citations (Scopus)

Abstract

A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.

Original languageEnglish
Pages (from-to)1309-1316
Number of pages8
JournalRussian Physics Journal
Volume52
Issue number12
DOIs
Publication statusPublished - 2009

Keywords

  • Growing coating
  • Mechanical stresses

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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