Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions

Abstract

A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.

Original language	English
Pages (from-to)	1309-1316
Number of pages	8
Journal	Russian Physics Journal
Volume	52
Issue number	12
DOIs	https://doi.org/10.1007/s11182-010-9372-7
Publication status	Published - 2009

Keywords

Growing coating
Mechanical stresses

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1007/s11182-010-9372-7

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title = "Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions",

abstract = "A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.",

keywords = "Growing coating, Mechanical stresses",

author = "Sorokova, {S. N.} and Knyazeva, {A. G.}",

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language = "English",

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AB - A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.

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KW - Mechanical stresses

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