Abstract
A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.
| Original language | English |
|---|---|
| Pages (from-to) | 1309-1316 |
| Number of pages | 8 |
| Journal | Russian Physics Journal |
| Volume | 52 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 2009 |
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Keywords
- Growing coating
- Mechanical stresses
ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions. / Sorokova, S. N.; Knyazeva, A. G.
In: Russian Physics Journal, Vol. 52, No. 12, 2009, p. 1309-1316.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions
AU - Sorokova, S. N.
AU - Knyazeva, A. G.
PY - 2009
Y1 - 2009
N2 - A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.
AB - A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.
KW - Growing coating
KW - Mechanical stresses
UR - http://www.scopus.com/inward/record.url?scp=77953542523&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77953542523&partnerID=8YFLogxK
U2 - 10.1007/s11182-010-9372-7
DO - 10.1007/s11182-010-9372-7
M3 - Article
VL - 52
SP - 1309
EP - 1316
JO - Russian Physics Journal
JF - Russian Physics Journal
SN - 1064-8887
IS - 12
ER -