Abstract
The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 2-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.
| Original language | English |
|---|---|
| Pages (from-to) | 261-264 |
| Number of pages | 4 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 315 |
| DOIs | |
| Publication status | Published - 15 Nov 2013 |
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Keywords
- Computer simulation
- Erosion yield
- Evaporation
- Ion pulsed irradiation
- Sputtering
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation
Cite this
Erosion yield of metal surface under ion pulsed irradiation. / Krivobokov, Valery; Stepanova, Olga; Yuryeva, Alena Victorovna.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 315, 15.11.2013, p. 261-264.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Erosion yield of metal surface under ion pulsed irradiation
AU - Krivobokov, Valery
AU - Stepanova, Olga
AU - Yuryeva, Alena Victorovna
PY - 2013/11/15
Y1 - 2013/11/15
N2 - The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 2-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.
AB - The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 2-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.
KW - Computer simulation
KW - Erosion yield
KW - Evaporation
KW - Ion pulsed irradiation
KW - Sputtering
UR - http://www.scopus.com/inward/record.url?scp=84901471525&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84901471525&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2013.04.012
DO - 10.1016/j.nimb.2013.04.012
M3 - Article
AN - SCOPUS:84901471525
VL - 315
SP - 261
EP - 264
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
ER -