Erosion yield of metal surface under ion pulsed irradiation

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Abstract

The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 2-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.

Original languageEnglish
Pages (from-to)261-264
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume315
DOIs
Publication statusPublished - 15 Nov 2013

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Keywords

  • Computer simulation
  • Erosion yield
  • Evaporation
  • Ion pulsed irradiation
  • Sputtering

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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