Erosion yield of metal surface under ion pulsed irradiation

Abstract

The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 ²-10¹⁰ W/cm². The ion beam and target parameters are shown to influence on the erosion intensity.

Original language	English
Pages (from-to)	261-264
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	315
DOIs	https://doi.org/10.1016/j.nimb.2013.04.012
Publication status	Published - 15 Nov 2013

Keywords

Computer simulation
Erosion yield
Evaporation
Ion pulsed irradiation
Sputtering

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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10.1016/j.nimb.2013.04.012

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title = "Erosion yield of metal surface under ion pulsed irradiation",

abstract = "The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 2-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.",

keywords = "Computer simulation, Erosion yield, Evaporation, Ion pulsed irradiation, Sputtering",

author = "Valery Krivobokov and Olga Stepanova and Yuryeva, {Alena Victorovna}",

year = "2013",

month = nov,

day = "15",

doi = "10.1016/j.nimb.2013.04.012",

language = "English",

volume = "315",

pages = "261--264",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

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T1 - Erosion yield of metal surface under ion pulsed irradiation

AU - Krivobokov, Valery

AU - Stepanova, Olga

AU - Yuryeva, Alena Victorovna

PY - 2013/11/15

Y1 - 2013/11/15

N2 - The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 2-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.

AB - The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 2-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.

KW - Computer simulation

KW - Erosion yield

KW - Evaporation

KW - Ion pulsed irradiation

KW - Sputtering

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EP - 264

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X