Abstract
The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 10 2-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.
Original language | English |
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Pages (from-to) | 261-264 |
Number of pages | 4 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 315 |
DOIs | |
Publication status | Published - 15 Nov 2013 |
Keywords
- Computer simulation
- Erosion yield
- Evaporation
- Ion pulsed irradiation
- Sputtering
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation