Erosion of solid surface under irradiation by high-power submicrosecond ion beams

O. M. Stepanova, V. P. Krivobokov

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid surface etching are assessed.

Original languageEnglish
Pages (from-to)122-125
Number of pages4
JournalBulletin of the Russian Academy of Sciences: Physics
Volume74
Issue number2
DOIs
Publication statusPublished - Feb 2010

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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