Erosion of solid surface under irradiation by high-power submicrosecond ion beams

O. M. Stepanova, V. P. Krivobokov

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid surface etching are assessed.

Original languageEnglish
Pages (from-to)122-125
Number of pages4
JournalBulletin of the Russian Academy of Sciences: Physics
Volume74
Issue number2
DOIs
Publication statusPublished - Feb 2010

Fingerprint

solid surfaces
erosion
ion beams
irradiation
atoms
etching
evaporation
simulation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Erosion of solid surface under irradiation by high-power submicrosecond ion beams. / Stepanova, O. M.; Krivobokov, V. P.

In: Bulletin of the Russian Academy of Sciences: Physics, Vol. 74, No. 2, 02.2010, p. 122-125.

Research output: Contribution to journalArticle

@article{549fa1ec9db84f7dbf3352aebf1004f3,
title = "Erosion of solid surface under irradiation by high-power submicrosecond ion beams",
abstract = "The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid surface etching are assessed.",
author = "Stepanova, {O. M.} and Krivobokov, {V. P.}",
year = "2010",
month = "2",
doi = "10.3103/S106287381002005X",
language = "English",
volume = "74",
pages = "122--125",
journal = "Bulletin of the Russian Academy of Sciences: Physics",
issn = "1062-8738",
publisher = "Allerton Press Inc.",
number = "2",

}

TY - JOUR

T1 - Erosion of solid surface under irradiation by high-power submicrosecond ion beams

AU - Stepanova, O. M.

AU - Krivobokov, V. P.

PY - 2010/2

Y1 - 2010/2

N2 - The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid surface etching are assessed.

AB - The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid surface etching are assessed.

UR - http://www.scopus.com/inward/record.url?scp=77950408333&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77950408333&partnerID=8YFLogxK

U2 - 10.3103/S106287381002005X

DO - 10.3103/S106287381002005X

M3 - Article

VL - 74

SP - 122

EP - 125

JO - Bulletin of the Russian Academy of Sciences: Physics

JF - Bulletin of the Russian Academy of Sciences: Physics

SN - 1062-8738

IS - 2

ER -