The process of erosion of the surface of quartz under the effect of powerful pulsed ion irradiation is examined. The optimum parameters of the beams for removing defective layers from the surface and producing different relief structures on the surface are calculated. Possibilities of utilising the ion erosion of quartz in the nanosecond regime of irradiation in practice are confirmed by experimental results.
|Number of pages||6|
|Journal||Physics and chemistry of materials treatment|
|Publication status||Published - Nov 1991|
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