Erosion of quartz under effect of high-power nanosecond ion particles

Process pf quartz surface erosion under effect of high-power pulsed ion irradiation is studied. Optimal parameters of beams are calculated to defect layers removing and different surface relief structures creation. Practical possibilities for quartz erosion by nanosecond ion irradiation are confirmed by experimental data. When exposed to a powerful ion beam texture of quartz texture surfaces remains unaffected and sometimes gets smoothed. Electron diffractometry shows the quartz surface layer structure to become amorphous. Transmission electron microscopy enables a roughness of texture of more than 1 nm high to be detected. The thermal model suggested for errosion is adequate for describing evaporation process of silicon dioxide molecules and the kinetics of phase transitions in quartz.