Energy input regimes in the EUV radiation source based on the pseudospark discharge

Yu D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, V. N. Landl, I. A. Shemyakin

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.

    Original languageEnglish
    Title of host publicationProceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
    Pages83-86
    Number of pages4
    Volume1
    DOIs
    Publication statusPublished - 2006
    Event22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV - Matsue, Japan
    Duration: 25 Sep 200629 Sep 2006

    Other

    Other22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
    CountryJapan
    CityMatsue
    Period25.9.0629.9.06

    ASJC Scopus subject areas

    • Engineering(all)

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  • Cite this

    Korolev, Y. D., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, V. N., & Shemyakin, I. A. (2006). Energy input regimes in the EUV radiation source based on the pseudospark discharge. In Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV (Vol. 1, pp. 83-86). [4194817] https://doi.org/10.1109/DEIV.2006.357237