Energy input regimes in the EUV radiation source based on the pseudospark discharge

Yu D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, V. N. Landl, I. A. Shemyakin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.

Original language	English
Title of host publication	Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Pages	83-86
Number of pages	4
Volume	1
DOIs	https://doi.org/10.1109/DEIV.2006.357237
Publication status	Published - 2006
Event	22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV - Matsue, Japan Duration: 25 Sep 2006 → 29 Sep 2006

Other

Other	22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Country	Japan
City	Matsue
Period	25.9.06 → 29.9.06

Fingerprint

ASJC Scopus subject areas

Engineering(all)

Cite this

Korolev, Y. D., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, V. N., & Shemyakin, I. A. (2006). Energy input regimes in the EUV radiation source based on the pseudospark discharge. In Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV (Vol. 1, pp. 83-86). [4194817] https://doi.org/10.1109/DEIV.2006.357237

Energy input regimes in the EUV radiation source based on the pseudospark discharge. / Korolev, Yu D.; Frants, O. B.; Geyman, V. G.; Ivashov, R. V.; Landl, V. N.; Shemyakin, I. A.

Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. Vol. 1 2006. p. 83-86 4194817.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Korolev, YD, Frants, OB, Geyman, VG, Ivashov, RV, Landl, VN & Shemyakin, IA 2006, Energy input regimes in the EUV radiation source based on the pseudospark discharge. in Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. vol. 1, 4194817, pp. 83-86, 22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Matsue, Japan, 25.9.06. https://doi.org/10.1109/DEIV.2006.357237

@inproceedings{fa010db7d7254eaf833f5caad936d7c7,

title = "Energy input regimes in the EUV radiation source based on the pseudospark discharge",

abstract = "In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.",

author = "Korolev, {Yu D.} and Frants, {O. B.} and Geyman, {V. G.} and Ivashov, {R. V.} and Landl, {V. N.} and Shemyakin, {I. A.}",

year = "2006",

doi = "10.1109/DEIV.2006.357237",

language = "English",

isbn = "1424401925",

volume = "1",

pages = "83--86",

booktitle = "Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV",

note = "22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV ; Conference date: 25-09-2006 Through 29-09-2006",

}

TY - GEN

T1 - Energy input regimes in the EUV radiation source based on the pseudospark discharge

AU - Korolev, Yu D.

AU - Frants, O. B.

AU - Geyman, V. G.

AU - Ivashov, R. V.

AU - Landl, V. N.

AU - Shemyakin, I. A.

PY - 2006

Y1 - 2006

N2 - In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.

AB - In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.

UR - http://www.scopus.com/inward/record.url?scp=46649120708&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=46649120708&partnerID=8YFLogxK

U2 - 10.1109/DEIV.2006.357237

DO - 10.1109/DEIV.2006.357237

M3 - Conference contribution

AN - SCOPUS:46649120708

SN - 1424401925

SN - 9781424401925

VL - 1

SP - 83

EP - 86

BT - Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

T2 - 22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Y2 - 25 September 2006 through 29 September 2006

ER -

Access to Document

10.1109/DEIV.2006.357237