Energy input regimes in the EUV radiation source based on the pseudospark discharge

Abstract

In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.

Original language	English
Title of host publication	Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Pages	83-86
Number of pages	4
Volume	1
DOIs	https://doi.org/10.1109/DEIV.2006.357237
Publication status	Published - 2006
Event	22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV - Matsue, Japan Duration: 25 Sep 2006 → 29 Sep 2006

Other

Other	22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Country	Japan
City	Matsue
Period	25.9.06 → 29.9.06

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/DEIV.2006.357237

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Korolev, Y. D., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, V. N., & Shemyakin, I. A. (2006). Energy input regimes in the EUV radiation source based on the pseudospark discharge. In Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV (Vol. 1, pp. 83-86). [4194817] https://doi.org/10.1109/DEIV.2006.357237

Energy input regimes in the EUV radiation source based on the pseudospark discharge. / Korolev, Yu D.; Frants, O. B.; Geyman, V. G.; Ivashov, R. V.; Landl, V. N.; Shemyakin, I. A.

Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. Vol. 1 2006. p. 83-86 4194817.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Korolev, YD, Frants, OB, Geyman, VG, Ivashov, RV, Landl, VN & Shemyakin, IA 2006, Energy input regimes in the EUV radiation source based on the pseudospark discharge. in Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. vol. 1, 4194817, pp. 83-86, 22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Matsue, Japan, 25.9.06. https://doi.org/10.1109/DEIV.2006.357237

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