Abstract
In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.
Original language | English |
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Title of host publication | Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV |
Pages | 83-86 |
Number of pages | 4 |
Volume | 1 |
DOIs | |
Publication status | Published - 2006 |
Event | 22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV - Matsue, Japan Duration: 25 Sep 2006 → 29 Sep 2006 |
Other
Other | 22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV |
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Country | Japan |
City | Matsue |
Period | 25.9.06 → 29.9.06 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Energy input regimes in the EUV radiation source based on the pseudospark discharge. / Korolev, Yu D.; Frants, O. B.; Geyman, V. G.; Ivashov, R. V.; Landl, V. N.; Shemyakin, I. A.
Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. Vol. 1 2006. p. 83-86 4194817.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Energy input regimes in the EUV radiation source based on the pseudospark discharge
AU - Korolev, Yu D.
AU - Frants, O. B.
AU - Geyman, V. G.
AU - Ivashov, R. V.
AU - Landl, V. N.
AU - Shemyakin, I. A.
PY - 2006
Y1 - 2006
N2 - In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.
AB - In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed.
UR - http://www.scopus.com/inward/record.url?scp=46649120708&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=46649120708&partnerID=8YFLogxK
U2 - 10.1109/DEIV.2006.357237
DO - 10.1109/DEIV.2006.357237
M3 - Conference contribution
AN - SCOPUS:46649120708
SN - 1424401925
SN - 9781424401925
VL - 1
SP - 83
EP - 86
BT - Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
ER -