Energy and substance transfer in magnetron sputtering systems with liquid-phase target

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

The regularities of energy and matter transfer in the magnetron sputtering systems (MSS) with liquid-phase targets were analyzed. For this purpose a mathematical model of heat and erosion processes in a thermally insulated target of MSS has been developed and the problem of energy balance in a substrate and its heating during coating deposition was solved. The model is based on the fact that the flow of atoms from the surface of the liquid-phase target under the action of plasma consists of two independent components: sputtered and vaporized particles. The reliability of this model is confirmed by a good agreement between the calculated and experimental data. Using the model developed the regularities of the rate of the target surface erosion and metal coatings deposition were revealed. We investigated the effect of the ion current power density and material properties of the cathode. The calculations according to this model and experiments show the growth rate of metal coatings reaches from 100 to 1000 nm/s when intense evaporation occurs. It is one or two orders of magnitude higher than the rate of coating deposition when using solid target. The results can be useful for the development of technologies of high-rate coating deposition.

Original languageEnglish
Pages (from-to)11-17
Number of pages7
JournalVacuum
Volume124
DOIs
Publication statusPublished - 1 Feb 2016

Fingerprint

Magnetron sputtering
magnetron sputtering
liquid phases
energy transfer
Metal coatings
Liquids
metal coatings
Coatings
Erosion
coatings
regularity
erosion
Energy balance
Materials properties
Evaporation
Cathodes
ion currents
Ions
coating
Mathematical models

Keywords

  • Erosion
  • Evaporation
  • High-rate coating deposition
  • Liquid-phase target
  • Magnetron sputtering systems
  • Sputtering

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Instrumentation
  • Surfaces, Coatings and Films

Cite this

Energy and substance transfer in magnetron sputtering systems with liquid-phase target. / Bleykher, G. A.; Krivobokov, V. P.; Yuryeva, Alena Victorovna; Sadykova, I.

In: Vacuum, Vol. 124, 01.02.2016, p. 11-17.

Research output: Contribution to journalArticle

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