Emission properties of broad-beam vacuum arc ion sources

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Abstract

Investigation results on emission properties of repetitively pulsed vacuum arc ion sources with a broad-beam diameter are presented in this report. Influence of the arc discharge current, geometric dimensions and shape of the anode on the arc discharge stability, and extraction efficiency of the ion current are analyzed. It is shown that under formation of broad ion beams due to plasma expansion of the cathode spot within the anode expander, it is expedient to utilize the conical geometry of the anode. Influence of the grid cell size or port diameter in multiaperture diaphragms on emission properties of the ion source is investigated. It is illustrated that under certain conditions the decelerating voltage drop can occur near the anode reducing the efficiency and operating stability of the source.

Original languageEnglish
Pages (from-to)2425-2427
Number of pages3
JournalReview of Scientific Instruments
Volume63
Issue number4
DOIs
Publication statusPublished - 1992

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ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

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