Electron-beam-induced modification of stoichiometry and acceleration of titanium diffusion in Al2O3/Al/C structures

A. D. Pogrebnyak, B. P. Gritsenko, S. M. Duvanov, N. A. Pogrebnyak, M. K. Kylyshkanov, V. V. Ponaryadov

Research output: Contribution to journalArticlepeer-review

Abstract

The electron-beam-induced modification of stoichiometry and acceleration of titanium diffusion in Al2O3/Al/C structures have been studied for the first time using He4+ ion backscattering, scanning electron microscopy, and electron probe microanalysis techniques. It is established that the electron beam treatment leads to an increase in the effective diffusion coefficient of ion-implanted titanium, changes the ratio of aluminum and oxygen concentrations in the α-Al2O3 layer, and induces the substitution of carbon for oxygen in this layer.

Original languageEnglish
Pages (from-to)1060-1063
Number of pages4
JournalTechnical Physics Letters
Volume32
Issue number12
DOIs
Publication statusPublished - Dec 2006
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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