Electron beam evaporation of the ceramic targets at a forevacuum pressure

A. S. Klimov, A. A. Zenin, E. M. Oks, M. V. Shandrikov, Y. G. Yushkov

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Using a plasma electron source, the process of beam evaporation of the aluminum oxide ceramic was achieved in the pressure range of 5-15 Pa. With the electron beam power density of 103 W/cm2, an evaporation rate for the ceramic was as high as 4 g/hr. The results open the possibility of making the effective ceramic coatings on the basis of electron-beam technologies.

Original languageEnglish
Pages (from-to)40-44
Number of pages5
JournalApplied Physics
Issue number3
Publication statusPublished - 2016
Externally publishedYes


  • Ceramic evaporation
  • Electron beam
  • Forevacuum pressure range
  • Plasma electron beam source

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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