By X-ray diffraction and transmission diffraction electron microscopy methods, the phase composition, macro- and microstresses, and microstructure in a Ti1–xAlxN coating and a substrate were investigated. The coatings were deposited by magnetron sputtering of a Ti–Al target in an Ar + N gas reaction mixture on a substrate of austenitic steel 12Kh18N10T preliminarily bombarded with a titanium ion beam. It was found that the increase in the duration of the preliminary ion treatment of the substrate leads to increasing compression macrostresses and refining of a nanocrystalline columnar microstructure in the Ti1–xAlxN coating.
- macro- and microstresses
- nanocrystalline columnar microstructure
- phase composition
- transmission diffraction electron microscopy
- X-ray diffraction analysis
ASJC Scopus subject areas
- Materials Science(all)