The Monte Carlo method is used to investigate the efficiency of conversion of the energy of low-energy electrons into x-ray radiation energy and it is shown that the characteristic radiation makes an important contribution to the energy absorbed by thin films undergoing radiation treatment. Selecting the converter material and thickness on the basis of the calculations can increase by a factor of 2-5 the radiation energy absorbed in thin films of semiconductor materials.
|Number of pages||2|
|Journal||Technical Physics Letters|
|Publication status||Published - Jan 1998|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)