Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings

V. Braic, D. Pavelescu, M. Balaceanu, C. N. Zoita, M. Braic, A. Kiss, A. Vladescu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work aims to investigate the influence of the energy and flux of the ions striking the substrate on the characteristics of the ZrCN coatings deposited by cathodic arc method. The coatings were investigated for elemental and phase composition, chemical binding state, texture, residual stress, hardness, adhesion and tribological behavior using GDOS, Raman spectroscopy and XRD techniques, surface profilometry, hardness and scratch adhesion measurements, and tribological tests. Various substrate current densities (in the range 2-7 mA/cm2) were obtained by using 1 or 2 cathodes, while different ion energies resulted from the variation of the substrate negative bias voltage (in the range 50 - 200 V). Chemical bonds, texture, mechanical and tribological characteristics of the films were observed to strongly depend on the ion bombardment conditions. The dominant factor in achieving high hardness values (in excess of 40 GPa) and superior wear resistance was found to be the substrate current density.

Original languageEnglish
Title of host publicationISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum
Pages503-506
Number of pages4
DOIs
Publication statusPublished - 29 Dec 2008
Externally publishedYes
Event23rd International Symposium on Discharges and Electrical Insulation in Vacuum, 23rd ISDEIV - Bucharest, Romania
Duration: 15 Sep 200819 Sep 2008

Publication series

NameProceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Volume2
ISSN (Print)1093-2941

Conference

Conference23rd International Symposium on Discharges and Electrical Insulation in Vacuum, 23rd ISDEIV
CountryRomania
CityBucharest
Period15.9.0819.9.08

Fingerprint

Hard coatings
Ion bombardment
Vacuum
Plasmas
Hardness
Substrates
Current density
Adhesion
Textures
Coatings
Profilometry
Chemical bonds
Ions
Bias voltage
Phase composition
Wear resistance
Raman spectroscopy
Residual stresses
Cathodes
Fluxes

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Software

Cite this

Braic, V., Pavelescu, D., Balaceanu, M., Zoita, C. N., Braic, M., Kiss, A., & Vladescu, A. (2008). Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings. In ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum (pp. 503-506). [4676840] (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV; Vol. 2). https://doi.org/10.1109/DEIV.2008.4676840

Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings. / Braic, V.; Pavelescu, D.; Balaceanu, M.; Zoita, C. N.; Braic, M.; Kiss, A.; Vladescu, A.

ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum. 2008. p. 503-506 4676840 (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Braic, V, Pavelescu, D, Balaceanu, M, Zoita, CN, Braic, M, Kiss, A & Vladescu, A 2008, Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings. in ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum., 4676840, Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, vol. 2, pp. 503-506, 23rd International Symposium on Discharges and Electrical Insulation in Vacuum, 23rd ISDEIV, Bucharest, Romania, 15.9.08. https://doi.org/10.1109/DEIV.2008.4676840
Braic V, Pavelescu D, Balaceanu M, Zoita CN, Braic M, Kiss A et al. Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings. In ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum. 2008. p. 503-506. 4676840. (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV). https://doi.org/10.1109/DEIV.2008.4676840
Braic, V. ; Pavelescu, D. ; Balaceanu, M. ; Zoita, C. N. ; Braic, M. ; Kiss, A. ; Vladescu, A. / Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings. ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum. 2008. pp. 503-506 (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV).
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