Abstract
This work aims to investigate the influence of the energy and flux of the ions striking the substrate on the characteristics of the ZrCN coatings deposited by cathodic arc method. The coatings were investigated for elemental and phase composition, chemical binding state, texture, residual stress, hardness, adhesion and tribological behavior using GDOS, Raman spectroscopy and XRD techniques, surface profilometry, hardness and scratch adhesion measurements, and tribological tests. Various substrate current densities (in the range 2-7 mA/cm2) were obtained by using 1 or 2 cathodes, while different ion energies resulted from the variation of the substrate negative bias voltage (in the range 50 - 200 V). Chemical bonds, texture, mechanical and tribological characteristics of the films were observed to strongly depend on the ion bombardment conditions. The dominant factor in achieving high hardness values (in excess of 40 GPa) and superior wear resistance was found to be the substrate current density.
| Original language | English |
|---|---|
| Title of host publication | ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum |
| Pages | 503-506 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 29 Dec 2008 |
| Externally published | Yes |
| Event | 23rd International Symposium on Discharges and Electrical Insulation in Vacuum, 23rd ISDEIV - Bucharest, Romania Duration: 15 Sep 2008 → 19 Sep 2008 |
Publication series
| Name | Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV |
|---|---|
| Volume | 2 |
| ISSN (Print) | 1093-2941 |
Conference
| Conference | 23rd International Symposium on Discharges and Electrical Insulation in Vacuum, 23rd ISDEIV |
|---|---|
| Country | Romania |
| City | Bucharest |
| Period | 15.9.08 → 19.9.08 |
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ASJC Scopus subject areas
- Computer Networks and Communications
- Software
Cite this
Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings. / Braic, V.; Pavelescu, D.; Balaceanu, M.; Zoita, C. N.; Braic, M.; Kiss, A.; Vladescu, A.
ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum. 2008. p. 503-506 4676840 (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV; Vol. 2).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings
AU - Braic, V.
AU - Pavelescu, D.
AU - Balaceanu, M.
AU - Zoita, C. N.
AU - Braic, M.
AU - Kiss, A.
AU - Vladescu, A.
PY - 2008/12/29
Y1 - 2008/12/29
N2 - This work aims to investigate the influence of the energy and flux of the ions striking the substrate on the characteristics of the ZrCN coatings deposited by cathodic arc method. The coatings were investigated for elemental and phase composition, chemical binding state, texture, residual stress, hardness, adhesion and tribological behavior using GDOS, Raman spectroscopy and XRD techniques, surface profilometry, hardness and scratch adhesion measurements, and tribological tests. Various substrate current densities (in the range 2-7 mA/cm2) were obtained by using 1 or 2 cathodes, while different ion energies resulted from the variation of the substrate negative bias voltage (in the range 50 - 200 V). Chemical bonds, texture, mechanical and tribological characteristics of the films were observed to strongly depend on the ion bombardment conditions. The dominant factor in achieving high hardness values (in excess of 40 GPa) and superior wear resistance was found to be the substrate current density.
AB - This work aims to investigate the influence of the energy and flux of the ions striking the substrate on the characteristics of the ZrCN coatings deposited by cathodic arc method. The coatings were investigated for elemental and phase composition, chemical binding state, texture, residual stress, hardness, adhesion and tribological behavior using GDOS, Raman spectroscopy and XRD techniques, surface profilometry, hardness and scratch adhesion measurements, and tribological tests. Various substrate current densities (in the range 2-7 mA/cm2) were obtained by using 1 or 2 cathodes, while different ion energies resulted from the variation of the substrate negative bias voltage (in the range 50 - 200 V). Chemical bonds, texture, mechanical and tribological characteristics of the films were observed to strongly depend on the ion bombardment conditions. The dominant factor in achieving high hardness values (in excess of 40 GPa) and superior wear resistance was found to be the substrate current density.
UR - http://www.scopus.com/inward/record.url?scp=57849098897&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=57849098897&partnerID=8YFLogxK
U2 - 10.1109/DEIV.2008.4676840
DO - 10.1109/DEIV.2008.4676840
M3 - Conference contribution
SN - 9789737553829
T3 - Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
SP - 503
EP - 506
BT - ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum
ER -