Effective nitriding of steels outside low-pressure microwave discharges

M. Růžička, J. Vlček, J. Musil

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Abstract

This paper reports on nitriding of low-alloy steel samples which are placed outside the plasma and exposed only to the effect of activated nitriding gas diffusing from a low-pressure microwave discharge with electron cyclotron resonance (ECR). It is shown that efficiency of nitriding of the samples located inside the discharge (i.e. at a standard distance d = 250 mm from the output aperture of the ECR source) and practically outside the plasma of microwave discharge (i.e. at a large distance d = 750 mm) is almost the same when 30% of hydrogen is added into the nitrogen hydrogen gas mixture and the pressure is decreased to 0.15 Pa. This finding is of principal importance because it enables to develop a new generation of nitriding devices.

Original languageEnglish
Pages (from-to)182-184
Number of pages3
JournalSurface and Coatings Technology
Volume156
Issue number1-3
DOIs
Publication statusPublished - 1 Jul 2002

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Keywords

  • Low-alloy steel
  • Low-pressure nitriding
  • Microwave discharges with electron cyclotron resonance

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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