Abstract
This paper reports on nitriding of low-alloy steel samples which are placed outside the plasma and exposed only to the effect of activated nitriding gas diffusing from a low-pressure microwave discharge with electron cyclotron resonance (ECR). It is shown that efficiency of nitriding of the samples located inside the discharge (i.e. at a standard distance d = 250 mm from the output aperture of the ECR source) and practically outside the plasma of microwave discharge (i.e. at a large distance d = 750 mm) is almost the same when 30% of hydrogen is added into the nitrogen hydrogen gas mixture and the pressure is decreased to 0.15 Pa. This finding is of principal importance because it enables to develop a new generation of nitriding devices.
| Original language | English |
|---|---|
| Pages (from-to) | 182-184 |
| Number of pages | 3 |
| Journal | Surface and Coatings Technology |
| Volume | 156 |
| Issue number | 1-3 |
| DOIs | |
| Publication status | Published - 1 Jul 2002 |
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Keywords
- Low-alloy steel
- Low-pressure nitriding
- Microwave discharges with electron cyclotron resonance
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
Effective nitriding of steels outside low-pressure microwave discharges. / Růžička, M.; Vlček, J.; Musil, J.
In: Surface and Coatings Technology, Vol. 156, No. 1-3, 01.07.2002, p. 182-184.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Effective nitriding of steels outside low-pressure microwave discharges
AU - Růžička, M.
AU - Vlček, J.
AU - Musil, J.
PY - 2002/7/1
Y1 - 2002/7/1
N2 - This paper reports on nitriding of low-alloy steel samples which are placed outside the plasma and exposed only to the effect of activated nitriding gas diffusing from a low-pressure microwave discharge with electron cyclotron resonance (ECR). It is shown that efficiency of nitriding of the samples located inside the discharge (i.e. at a standard distance d = 250 mm from the output aperture of the ECR source) and practically outside the plasma of microwave discharge (i.e. at a large distance d = 750 mm) is almost the same when 30% of hydrogen is added into the nitrogen hydrogen gas mixture and the pressure is decreased to 0.15 Pa. This finding is of principal importance because it enables to develop a new generation of nitriding devices.
AB - This paper reports on nitriding of low-alloy steel samples which are placed outside the plasma and exposed only to the effect of activated nitriding gas diffusing from a low-pressure microwave discharge with electron cyclotron resonance (ECR). It is shown that efficiency of nitriding of the samples located inside the discharge (i.e. at a standard distance d = 250 mm from the output aperture of the ECR source) and practically outside the plasma of microwave discharge (i.e. at a large distance d = 750 mm) is almost the same when 30% of hydrogen is added into the nitrogen hydrogen gas mixture and the pressure is decreased to 0.15 Pa. This finding is of principal importance because it enables to develop a new generation of nitriding devices.
KW - Low-alloy steel
KW - Low-pressure nitriding
KW - Microwave discharges with electron cyclotron resonance
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UR - http://www.scopus.com/inward/citedby.url?scp=0036642212&partnerID=8YFLogxK
U2 - 10.1016/S0257-8972(02)00080-4
DO - 10.1016/S0257-8972(02)00080-4
M3 - Article
VL - 156
SP - 182
EP - 184
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 1-3
ER -