Abstract
This paper reports on nitriding of low-alloy steel samples which are placed outside the plasma and exposed only to the effect of activated nitriding gas diffusing from a low-pressure microwave discharge with electron cyclotron resonance (ECR). It is shown that efficiency of nitriding of the samples located inside the discharge (i.e. at a standard distance d = 250 mm from the output aperture of the ECR source) and practically outside the plasma of microwave discharge (i.e. at a large distance d = 750 mm) is almost the same when 30% of hydrogen is added into the nitrogen hydrogen gas mixture and the pressure is decreased to 0.15 Pa. This finding is of principal importance because it enables to develop a new generation of nitriding devices.
Original language | English |
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Pages (from-to) | 182-184 |
Number of pages | 3 |
Journal | Surface and Coatings Technology |
Volume | 156 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 1 Jul 2002 |
Keywords
- Low-alloy steel
- Low-pressure nitriding
- Microwave discharges with electron cyclotron resonance
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry