TY - JOUR
T1 - Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target
AU - Fedotkin, A. Y.
AU - Kozelskaya, A. I.
AU - Tverdokhlebov, S. I.
PY - 2019/9/12
Y1 - 2019/9/12
N2 - This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.
AB - This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.
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U2 - 10.1088/1742-6596/1313/1/012018
DO - 10.1088/1742-6596/1313/1/012018
M3 - Conference article
AN - SCOPUS:85073590876
VL - 1313
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012018
T2 - 26th International Conference on Vacuum Technique and Technology, VTT 2019
Y2 - 18 June 2019 through 20 June 2019
ER -