Abstract
This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.
| Original language | English |
|---|---|
| Article number | 012018 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1313 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 12 Sep 2019 |
| Event | 26th International Conference on Vacuum Technique and Technology, VTT 2019 - Saint Petersburg, Russian Federation Duration: 18 Jun 2019 → 20 Jun 2019 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target. / Fedotkin, A. Y.; Kozelskaya, A. I.; Tverdokhlebov, S. I.
In: Journal of Physics: Conference Series, Vol. 1313, No. 1, 012018, 12.09.2019.Research output: Contribution to journal › Conference article
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TY - JOUR
T1 - Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target
AU - Fedotkin, A. Y.
AU - Kozelskaya, A. I.
AU - Tverdokhlebov, S. I.
PY - 2019/9/12
Y1 - 2019/9/12
N2 - This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.
AB - This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.
UR - http://www.scopus.com/inward/record.url?scp=85073590876&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85073590876&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/1313/1/012018
DO - 10.1088/1742-6596/1313/1/012018
M3 - Conference article
AN - SCOPUS:85073590876
VL - 1313
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012018
ER -