Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target

Research output: Contribution to journalConference article

Abstract

This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.

Original languageEnglish
Article number012018
JournalJournal of Physics: Conference Series
Volume1313
Issue number1
DOIs
Publication statusPublished - 12 Sep 2019
Event26th International Conference on Vacuum Technique and Technology, VTT 2019 - Saint Petersburg, Russian Federation
Duration: 18 Jun 201920 Jun 2019

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radio frequencies
magnetron sputtering
coatings
gases
light emission
optical spectrum
emission spectra

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

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abstract = "This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.",
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