Effect of thermal treatment on the structure and mechanical properties of coatings based on (Ti, Hf, Nb, Si)N

A. P. Shypylenko, A. Sh Kaverina, F. F. Komarov, A. I. Kupchishin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper presents the results of original research of nanostructured coatings based on (Ti, Hf, Nb, Si)N deposited by CAVD method. Coatings were investigated by several complementary methods of the structural element-analysis, such as: proton microbeam (μ-PIXE), micro- and nano-electron beam (EDX and SEM analysis), XRD. Elemental composition, microstructure, residual stresses in nanograins, profiles of atomic distribution on the surface of coatings in 3D view, phase composition, texture of surface were determined before and after annealing at temperatures 300, 500, 800, 1000°C (annealing time τ = 30 min).

Original languageEnglish
Title of host publicationCriMiCo 2013 - 2013 23rd International Crimean Conference Microwave and Telecommunication Technology, Conference Proceedings
Pages853-854
Number of pages2
Publication statusPublished - 31 Dec 2013
Externally publishedYes
Event2013 23rd International Crimean Conference Microwave and Telecommunication Technology, CriMiCo 2013 - Sevastopol, Crimea, Ukraine
Duration: 8 Sep 201314 Sep 2013

Publication series

NameCriMiCo 2013 - 2013 23rd International Crimean Conference Microwave and Telecommunication Technology, Conference Proceedings

Conference

Conference2013 23rd International Crimean Conference Microwave and Telecommunication Technology, CriMiCo 2013
CountryUkraine
CitySevastopol, Crimea
Period8.9.1314.9.13

ASJC Scopus subject areas

  • Computer Networks and Communications

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  • Cite this

    Shypylenko, A. P., Kaverina, A. S., Komarov, F. F., & Kupchishin, A. I. (2013). Effect of thermal treatment on the structure and mechanical properties of coatings based on (Ti, Hf, Nb, Si)N. In CriMiCo 2013 - 2013 23rd International Crimean Conference Microwave and Telecommunication Technology, Conference Proceedings (pp. 853-854). [6653094] (CriMiCo 2013 - 2013 23rd International Crimean Conference Microwave and Telecommunication Technology, Conference Proceedings).