Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope

Abstract

The aim of the research was to determine the effect of temperature on mechanical properties of a micromechanical gyroscope with the sensing element mounted on a silicon wafer, with the crystallographic orientation of (100) (110) (111). The research is of current relevancy since the metrological characteristics that depend on the eigenfrequencies over the full temperature range are to be controlled. The temperature-modal analysis of the micromechanical gyroscope model was performed with ANSYS program. The temperature dependence for eigenfrequencies was obtained. The dependence of the scale factor on temperature for the most temperature-independent variant of sensor positioning on the wafer was determined. The developed mathematical model was used to find the forms of the output oscillations of the gyroscope.

Original language	English
Title of host publication	IOP Conference Series: Materials Science and Engineering
Publisher	Institute of Physics Publishing
Volume	81
Edition	1
DOIs	https://doi.org/10.1088/1757-899X/81/1/012096
Publication status	Published - 23 Apr 2015
Event	International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014 - Tomsk, Russian Federation Duration: 3 Nov 2014 → 8 Nov 2014

Other

Other	International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014
Country	Russian Federation
City	Tomsk
Period	3.11.14 → 8.11.14

ASJC Scopus subject areas

Engineering(all)
Materials Science(all)

Access to Document

10.1088/1757-899X/81/1/012096

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Nesterenko, T. G., Vtorushin, S. E., Barbin, E. S., & Koleda, AN. (2015). Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope. In IOP Conference Series: Materials Science and Engineering (1 ed., Vol. 81). [012096] Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/81/1/012096

Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope. / Nesterenko, T. G.; Vtorushin, S. E.; Barbin, Evgenii Sergeevich ; Koleda, Aleksei Nikolaevich.

IOP Conference Series: Materials Science and Engineering. Vol. 81 1. ed. Institute of Physics Publishing, 2015. 012096.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nesterenko, TG, Vtorushin, SE, Barbin, ES & Koleda, AN 2015, Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope. in IOP Conference Series: Materials Science and Engineering. 1 edn, vol. 81, 012096, Institute of Physics Publishing, International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014, Tomsk, Russian Federation, 3.11.14. https://doi.org/10.1088/1757-899X/81/1/012096

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