Abstract
The aim of the research was to determine the effect of temperature on mechanical properties of a micromechanical gyroscope with the sensing element mounted on a silicon wafer, with the crystallographic orientation of (100) (110) (111). The research is of current relevancy since the metrological characteristics that depend on the eigenfrequencies over the full temperature range are to be controlled. The temperature-modal analysis of the micromechanical gyroscope model was performed with ANSYS program. The temperature dependence for eigenfrequencies was obtained. The dependence of the scale factor on temperature for the most temperature-independent variant of sensor positioning on the wafer was determined. The developed mathematical model was used to find the forms of the output oscillations of the gyroscope.
Original language | English |
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Title of host publication | IOP Conference Series: Materials Science and Engineering |
Publisher | Institute of Physics Publishing |
Volume | 81 |
Edition | 1 |
DOIs | |
Publication status | Published - 23 Apr 2015 |
Event | International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014 - Tomsk, Russian Federation Duration: 3 Nov 2014 → 8 Nov 2014 |
Other
Other | International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014 |
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Country | Russian Federation |
City | Tomsk |
Period | 3.11.14 → 8.11.14 |
ASJC Scopus subject areas
- Engineering(all)
- Materials Science(all)