EFFECT OF SMALL DOSES OF gamma RAYS ON THE STRUCTURE OF MICRODEFECTS AND ON THE ELECTROPHYSICAL PROPERTIES OF SILICON SINGLE CRYSTALS AND EPITAXIAL LAYERS.

V. G. Mokerov, S. N. Nikiforova-Denisova, E. N. Ovcharenko, V. P. Panasyuk, V. I. Smirnov, Yu A. Timoshnikov, I. P. Chernov

Research output: Contribution to journal › Article

Abstract

In this investigation the authors have studied the action of gamma rays on the swirl picture of microdefects of single crystal silicon, as well as on the electrophysical characteristics of single crystal silicon, epitaxial layers and device structures based on them.

Original languageEnglish
Pages (from-to)28-32
Number of pages5
JournalSoviet microelectronics
Volume15
Issue number1
Publication statusPublished - Jan 1986

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Epitaxial layers
Gamma rays
Single crystals
Silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mokerov, V. G., Nikiforova-Denisova, S. N., Ovcharenko, E. N., Panasyuk, V. P., Smirnov, V. I., Timoshnikov, Y. A., & Chernov, I. P. (1986). EFFECT OF SMALL DOSES OF gamma RAYS ON THE STRUCTURE OF MICRODEFECTS AND ON THE ELECTROPHYSICAL PROPERTIES OF SILICON SINGLE CRYSTALS AND EPITAXIAL LAYERS. Soviet microelectronics, 15(1), 28-32.

EFFECT OF SMALL DOSES OF gamma RAYS ON THE STRUCTURE OF MICRODEFECTS AND ON THE ELECTROPHYSICAL PROPERTIES OF SILICON SINGLE CRYSTALS AND EPITAXIAL LAYERS. / Mokerov, V. G.; Nikiforova-Denisova, S. N.; Ovcharenko, E. N.; Panasyuk, V. P.; Smirnov, V. I.; Timoshnikov, Yu A.; Chernov, I. P.

In: Soviet microelectronics, Vol. 15, No. 1, 01.1986, p. 28-32.

Research output: Contribution to journal › Article

Mokerov, VG, Nikiforova-Denisova, SN, Ovcharenko, EN, Panasyuk, VP, Smirnov, VI, Timoshnikov, YA & Chernov, IP 1986, 'EFFECT OF SMALL DOSES OF gamma RAYS ON THE STRUCTURE OF MICRODEFECTS AND ON THE ELECTROPHYSICAL PROPERTIES OF SILICON SINGLE CRYSTALS AND EPITAXIAL LAYERS.', Soviet microelectronics, vol. 15, no. 1, pp. 28-32.
Mokerov VG, Nikiforova-Denisova SN, Ovcharenko EN, Panasyuk VP, Smirnov VI, Timoshnikov YA et al. EFFECT OF SMALL DOSES OF gamma RAYS ON THE STRUCTURE OF MICRODEFECTS AND ON THE ELECTROPHYSICAL PROPERTIES OF SILICON SINGLE CRYSTALS AND EPITAXIAL LAYERS. Soviet microelectronics. 1986 Jan;15(1):28-32.
Mokerov, V. G. ; Nikiforova-Denisova, S. N. ; Ovcharenko, E. N. ; Panasyuk, V. P. ; Smirnov, V. I. ; Timoshnikov, Yu A. ; Chernov, I. P. / EFFECT OF SMALL DOSES OF gamma RAYS ON THE STRUCTURE OF MICRODEFECTS AND ON THE ELECTROPHYSICAL PROPERTIES OF SILICON SINGLE CRYSTALS AND EPITAXIAL LAYERS. In: Soviet microelectronics. 1986 ; Vol. 15, No. 1. pp. 28-32.
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